Flexible magnetic field measurement device and manufacturing method

Abstract

The invention discloses a flexible magnetic field measurement device and a manufacturing method and belongs to the magnetic sensor field. The device comprises a flexible substrate layer, a metal buffer layer, a magnetostrictive layer, a piezoelectric film layer and a protection layer which are sequentially laminated from down to up, wherein a side of the piezoelectric film layer corresponding to the protection layer is provided with an energy transducer layer embedded in the protection layer, and the energy transducer layer is a single-end or double-end resonance type structure composed of aninterdigital energy transducer and a reflecting grating. The measurement device is advantaged in that through utilizing the flexible substrate material, compared with a sensor prepared from a traditional rigidity substrate material, besides surface acoustic wave modes including common rayleigh waves and Love waves, a new wave mode, e.g., lamb waves can be further generated by the flexible magneticsensor, so bending property, high magnetic field sensitivity, integrated processing and low cost are realized, and the measurement device is suitable for miniaturization and intelligentization development of sensors, and the measurement device is applicable to magnetic field measurement and intelligent wearing fields.

Description

technical field [0001] The invention belongs to the technical field of magnetic sensors, and relates to a bendable magnetic field measuring device and a preparation method thereof. Background technique [0002] As one of the three pillars of information technology, sensor technology can convert various things to be measured in life into physical quantities that are easy to monitor and control. The magnetic field is distributed in every corner of the world, and various functions can be realized through the measurement of the magnetic field. In view of the rapid development of electronic skin, smart wear, geomagnetic navigation and other application backgrounds, research on flexible magnetic sensors has attracted the attention of researchers in recent years. The patent with publication number CN204575096U discloses a flexible magnetic torsion magnetoelectric sensor based on flexible piezoelectric material PVDF and permanent magnets, but the sensor must be placed in a hanging ...

AI Technical Summary

Problems solved by technology

The patent with publication number CN204575096U discloses a flexible magnetic torsion magnetoelectric sensor based on flexible piezoelectric material PVDF and permanent magnets, but the sensor must be placed in a hanging manner, which limits the working environment of the sensor; Patent No. CN106018569A discloses a flexible magnetic sensor using a flexible magnet and a flexible arc-shaped return coil. The sensor realizes non-destructive testing according to the principle of Lorentz force and eddy current loss; The flexible magnetic sensor of the coil also uses the eddy current effect to realize the detection. This sensor is mainly used for the detection of high-voltage wire defects. Most of the above-mentioned sensors are used in the field of non-destructive testing, and the applicable fields are relatively limited.

Images