Wiring board assembly
A technology of wiring substrates and joints, applied in the direction of electric solid-state devices, semiconductor devices, stacked printed circuit boards, etc., can solve the problems of easy shrinkage of flexible substrate 110, damage of joint parts, disconnection, etc.
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[0025] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. figure 1 is a cross-sectional view showing a schematic configuration of the plasma processing apparatus 10, figure 2 It is a perspective view showing the internal structure of the plate heater 30 .
[0026] Such as figure 1 As shown, a plasma processing apparatus 10 as a semiconductor manufacturing apparatus includes a vacuum chamber 12 , a shower head 14 , and an electrostatic chuck heater 20 . The vacuum chamber 12 is a box-shaped container formed of aluminum alloy or the like. The shower head 14 is disposed on the top surface of the vacuum chamber 12 . The shower head 14 discharges the processing gas supplied from the gas introduction pipe 16 into the vacuum chamber 12 through a plurality of gas injection holes 18 . In addition, the shower head 14 functions as a cathode plate for generating plasma. The electrostatic chuck heater 20 is a device for suc...
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