Microscope focus offset measurement device

Abstract

The invention discloses a microscope focus offset measurement device. The device comprises a laser for emitting a light beam; a spatial filtering module composed of two lenses and a pinhole located between the two lenses, and used for filtering and processing the light beam, wherein the central axes of the two lenses are coincided with each other; an adjustable aperture for adjusting a visual field diaphragm; a beam-shrinking module for reducing the diameter of the light beam; a beam splitter for splitting the light beam into a light transmission beam and a reflection beam; and an image sensorfor acquiring the displacement of a light spot on the image sensor. The light beam is emitted by the laser. After that, the light beam successively passes through the spatial filtering module, the adjustable aperture, the beam-shrinking module, the beam splitter and the objective lens of a microscope. After the light beam is converged through the objective lens of the microscope, two light beamsare formed after the light beam is reflected by the upper and lower surfaces of the cover glass. The two light beams successively pass through the objective lens to be imaged on the image sensor through the transmission imaging of the beam splitter. The image sensor is provided with a line-array CCD. According to the invention, the interference of reflected light spots on the lower surface of thecover glass can be excluded, and the positioning precision of light spots is improved. Meanwhile, the stability and the response speed of the device are improved.

Description

technical field [0001] The invention relates to the field of optical microscope autofocus, in particular to a microscope focus offset measuring device. Background technique [0002] Focus shift will affect the image clarity, and even lead to the failure of the entire observation experiment. During long-term live cell observation experiments and three-dimensional slice imaging of samples, the phenomenon of microscope focus shift will become extremely significant. Autofocus technology can effectively solve this problem. [0003] Autofocus technology is divided into passive and active two categories. A typical passive focusing method is based on image processing technology, and judges whether the sample is in focus through certain features of the collected images. The existing passive focusing method has unstable focusing accuracy, slow focusing speed, poor real-time performance, and will fail for samples with a certain thickness. Active focusing is to achieve focusing by a...

AI Technical Summary

Problems solved by technology

If the detector used by the autofocus system is a non-imaging device, the system cannot distinguish the two surfaces of the cover glass, so it cannot work normally; if the detector used by the autofocus system is an imaging device, but the traditional image processing method is used for data processing If the processing method is different, a large error will be generated, making the focus accuracy unstable and the focus error large

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