A point-source ectopic beam expander synchronously phase-shifted Fizeau interferometer and its measurement method
A Fizeau interferometer and synchronous phase shifting technology, which is applied in the field of point source ectopic beam expander synchronous phase shifting Fizeau interferometer and its measurement, which can solve the problem that the optical uniformity error cannot be completely eliminated and the resolution of the interferometer encounters a bottleneck , loss of spatial resolution, etc., to achieve the effect of easy test implementation, improved detection resolution and accuracy, and compact structure
Active Publication Date: 2019-10-18
NANJING UNIV OF SCI & TECH
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However, due to the use of four adjacent pixels as a solution unit to restore the phase, the spatial resolution will be lost
In addition, due to the limitation of the manufacturing process of the micro-polarization array, further improvement of the resolution of the interferometer will encounter a bottleneck
Furthermore, for a large-aperture interferometer system, due to factors such as glass material manufacturing and mechanical support, the optical uniformity error caused by stress birefringence cannot be completely eliminated, and polarization aberration will cause blurred contrast of the interferogram and wavefront measurement error
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Embodiment 1
[0065] The structure of the optical path of the point source dissimilar beam expander and synchronous phase-shifting Fizeau interferometer of the present invention is as follows: figure 1 shown, including,
[0066] 1) The point light source array 1 is used to generate four diverging spherical waves with the same complex amplitude but different spatial positions. The point light source array 1 includes a point light source 2 , a first collimating objective lens 3 , a checkerboard grating 4 , a first converging objective lens 5 and an aperture stop 6 . The point light source 2 produces multiple diffraction orders after passing through the first collimating objective lens 3, the checkerboard grating 4 and the first converging objective lens 5, and the aperture stop 6 is used to filter out four (±1, ±1) orders of the checkerboard grating 4 light, and filter out other orders of diffracted light. The four point light sources are respectively located at the four vertices of the squ...
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The invention discloses a point source heterotopic beam expansion synchronous phase shift fizeau interferometer and a measurement method thereof. The interferometer comprises a spot light source array, a fizeau main interferometer and a light splitting imaging assembly. The method comprises steps that four identical spherical waves generated by the point light source array respectively enter the main interferometer, through adjusting a distance between the spot light source array on a collimation object lens focal plane of the main interferometer and a light axis, four collimation wavefronts emitted by the main interferometer are incident to a reference lens in different angles, so different phase shifts are introduced to interference of a reference surface and a test surface, four intelligible imaging phase shift interferograms are simultaneously acquired on a CCD through the light splitting imaging assembly. The interferometer is advantaged in that properties of low cost, good anti-vibration performance and easy operation are realized, and the interferometer can be applied to the real-time high precision detection field of optical elements.
Description
technical field [0001] The invention belongs to the technical field of optical interferometric measuring instruments, in particular to a point-source dissimilar beam expanding synchronous phase-shifting Fizeau interferometer and a measuring method thereof. Background technique [0002] Fizeau-type interferometers are widely used in the field of optical measurement. Its common optical path structure enables the aberration of the internal optical system of the interferometer to be offset in the measurement results, thereby realizing high-precision detection of optical components. However, during the data acquisition process of this kind of interferometer, environmental interference will destroy the accuracy of the phase shift, resulting in measurement errors, and in severe cases, the measurement cannot even be carried out. How to apply Fizeau interferometer to dynamic measurement in unsteady environment is a current research hotspot. [0003] At present, the Fizeau-type synch...
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IPC IPC(8): G01B9/02G01B11/24G01M11/02G02B27/09
Inventor 陈磊朱文华张瑞杨影丁煜郑东晖孙沁园韩志刚朱日宏
Owner NANJING UNIV OF SCI & TECH