Device and method for high-locality micro electrodeposition of piezoelectric ceramics by adopting laser shocking

A technology of piezoelectric ceramics and laser shock, applied in the direction of circuits, semiconductor devices, etc., can solve the problems of complex operation process and numerous processes, and achieve the effects of strong controllability, simple operation, and poor localization

Active Publication Date: 2018-02-23
JIANGSU UNIV
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Problems solved by technology

[0005] Laser-induced chemical deposition has certain advantages, but

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  • Device and method for high-locality micro electrodeposition of piezoelectric ceramics by adopting laser shocking
  • Device and method for high-locality micro electrodeposition of piezoelectric ceramics by adopting laser shocking

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Embodiment Construction

[0034] The present invention will be further described below with reference to the drawings and specific embodiments, but the protection scope of the present invention is not limited to this.

[0035] Attached figure 1 The computer 1 is connected to the laser 6, the DC pulse power supply 2, and the motion control card 4. The computer 1 can control the laser parameters of the pulse laser 6 and the DC pulse power supply 2 power parameters, and can also transmit the compiled code to the motion control card 4. The oscilloscope 3 is connected to the DC pulse power supply 2 to monitor current parameters in real time; the working tank 10 is placed on the xyz three-axis worktable 15, the piezoelectric ceramic substrate 8 and the anode tool 9 are both placed in the working tank 10; the laser beam is emitted from the laser 6 , The transmission direction is changed by the reflection of the mirror 5, and then the through hole of the anode tool 9 is focused through the focusing lens 7 to focus...

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Abstract

The invention discloses a device and method for high-locality micro electrodeposition of piezoelectric ceramics by adopting laser shocking, and relates to the field of laser manufacturing. The devicecomprises a workpiece processing system, a laser irradiation system, a working liquid circulation system and a control system. The method comprises the following steps: an electrodeposition solution is subjected to laser breakdown to generate plasma bubbles, the plasma bubbles impact on the surface of the piezoelectric ceramics, electric charges are gathered at the part where the piezoelectric ceramics deforms, and the piezoelectric effect of the piezoelectric ceramics is utilized to realize the high-locality micro electrodeposition. According to the device and method for high-locality micro electrodeposition of the piezoelectric ceramics by adopting laser shocking, the energy density at the laser focus is high, the solution is subjected to laser breakdown to generate plasma bubbles, the plasma bubbles generated by laser shocking impact on the piezoelectric ceramics to enable the piezoelectric ceramics to produce elastic deformation to cause polarization, negative electric charges aregathered on the surface of the piezoelectric ceramics after deformation, and negative charges are gathered in the deformation area and the electric potential becomes lower, metal cations in the solution are adsorbed and reduced, so as to realize the high-locality micro electrodeposition. The device and method are mainly used for manufacturing of micro-nano parts.

Description

Technical field [0001] The invention relates to the field of localized micro-processing in special processing technology, in particular to a method and device for localized micro-electrodeposition of piezoelectric ceramics by laser shock, which is suitable for processing and manufacturing micro metal parts. Background technique [0002] The micro-electrodeposition technology is an additive manufacturing technology based on the principle of cathode deposition. The processing process is carried out in the form of a reduction reaction of metal ions on the surface of the cathode. In the electrochemical manufacturing process, the transfer of materials is carried out on an ionic scale. The size of metal ions is one-tenth of a nanometer or even smaller. Therefore, electrochemical manufacturing technology makes it very useful in the field of micro-manufacturing and even nano-manufacturing. Development potential. Although electrochemical machining has advantages in principle, another fea...

Claims

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Application Information

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IPC IPC(8): C25D5/02C25D5/54C25D5/18C25D7/12
CPCC25D5/024C25D5/18C25D5/54C25D7/12
Inventor 张朝阳戴学仁徐金磊曹增辉赵斗艳王安斌朱帅杰
Owner JIANGSU UNIV
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