Exposure illumination device

A technology for lighting devices and exposure surfaces, which is applied in photolithographic exposure devices, microlithography exposure equipment, optics, etc., can solve the problems of increasing substrate manufacturing costs, increasing costs, and increasing replacement frequency, achieving stable substrate exposure and improving Effects of manufacturing efficiency, securing uniformity, and sufficient illuminance
CN107728433AActive Publication Date: 2018-02-23YOKOHAMA LEADING DESIGN
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
YOKOHAMA LEADING DESIGN
Publication Date
2018-02-23

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Abstract

An exposure illumination device provided by the present invention irradiate the light beams emitted out by the light sources 10 of a plurality of LED assemblies which are in discrete configuration according to the specified intervals to an exposure surface 80, a plurality of tapered first light guide bodies 20 are arranged at the emergent side of each of the plurality of LED assemblies, along theoptical axis direction 70 of the light beams emitted out by the LED assemblies 11, the sizes of the plurality of tapered first light guide bodies 20 increase gradually, and the area of the emergent end faces 22 is set to be greater than the area of the incident end faces 21 of the light beams, and the size of the light beam emitted out from the LED assembly 11 on the incident end face 21 of the first light guide body is set to be greater than the incident end face 21 of the first light guide body. The exposure illumination device can guarantee the brightness distribution uniformity of the light beams emitted out from the plurality of LED assemblies which are in discrete configuration according to the specified intervals and the sufficient illumination, and carry out the stable substrate exposure.
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Description

technical field

[0001] The present invention relates to an exposure lighting device, and more particularly to an exposure lighting device that irradiates an exposure surface with light beams emitted from a plurality of LED modules discretely arranged at intervals. Background technique

[0002] Conventionally, various exposure lighting devices for exposing a substrate are known. The exposure lighting device irradiates the light beam emitted from the light source to the exposure surface through optical equipment such as a lens system, and exposes the substrate. As a light source for such an exposure lighting device, a light source with high brightness is selected. As shown in Patent Document 1 and Patent Document 2, conventionally, for example, an ultraviolet lamp or a halogen lamp has been used.

[0003] However, ultraviolet lamps or halogen lamps used in exposure lighting devices generally have a short life, although high brightness can be obtained. Therefore, an increase...

Claims

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