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Cooling plate and evaporation device

A cooling plate and vapor deposition technology, applied in the coating and other directions, can solve the problem that the cooling plate is easy to scratch the glass substrate, so as to reduce the probability of scratching the glass substrate, reduce the contact area, and reduce the electrostatic adsorption force. Effect

Inactive Publication Date: 2018-02-27
BOE TECH GRP CO LTD +1
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Problems solved by technology

[0005] The invention provides a cooling plate and an evaporation device, which can solve the problem of electrostatic adsorption between the cooling plate and the glass substrate in the related art when the cooling plate and the glass substrate are aligned and superimposed, thus causing the cooling plate to easily scratch the glass substrate problem, the technical solution is as follows:

Method used

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  • Cooling plate and evaporation device

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Embodiment Construction

[0028] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present disclosure, not all of them. . Based on the embodiments in the present disclosure, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present disclosure.

[0029] OLED display devices are more and more widely used, and evaporation devices are usually used to manufacture OLED display devices, please refer to figure 1 The evaporation device 10 generally includes a cooling plate 104 , and when cooling the mask plate 103 , it is usually necessary to stack the cooling plate 104 and the glass substrate 20 in position.

[0030] Cooling tubes ( figure 1 Not shown in ), the two ends of the cooling pipe...

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Abstract

The invention provides a cooling plate and an evaporation device and belongs to the technical field of display. The cooling plate comprises a cooling plate body. The cooling plate body comprises a cooling face with a cooling function. Protrusions are arranged on the cooling face. By the adoption of the cooling plate and the evaporation device, the problem that during position alignment and overlapping of the cooling plate and a glass substrate, electrostatic adsorption force can be generated between the cooling plate and the glass substrate, and consequently the glass substrate is scratched easily by the cooling plate is solved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a cooling plate and an evaporation device. Background technique [0002] Organic Light-Emitting Diode (English: Organic Light-Emitting Diode, referred to as: OLED) display devices are more and more widely used due to their many advantages such as active light emission and fast response speed, and OLED display devices are usually manufactured using evaporation devices. [0003] Such as figure 1 As shown, the evaporation device 10 generally includes: an evaporation chamber 101 , a crucible 102 , a mask plate 103 and a cooling plate 104 , wherein the material of the cooling plate 104 is generally a metal material with a rough surface and burrs. The OLED display device includes a glass substrate 20, and an evaporation material ( figure 1 not shown). When using the evaporation device 10 to form the evaporation material on the glass substrate 20 , it is necessary to firstly fill th...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C03C17/00
CPCC23C14/24C03C17/002C03C2218/15
Inventor 张新建黄俊杰吴文泽阮士薪张德
Owner BOE TECH GRP CO LTD
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