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A developing machine and its transmission device

A technology of developing machine and developing solution, which is applied in the direction of photographic plate-making process exposure device, photography, optical mechanical equipment, etc., can solve the problems of uneven development, reduce the contact area, improve uneven development, and reduce the probability of water film formation Effect

Active Publication Date: 2020-06-09
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide a developing machine that reduces the contact area between the developer nozzle and the transmission unit below it, reduces the probability of water film formation, and improves the problem of uneven development

Method used

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  • A developing machine and its transmission device
  • A developing machine and its transmission device

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Embodiment Construction

[0014] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0015] see in conjunction Figure 1-Figure 2 Shown is Embodiment 1 of the transmission device for developing machine of the present invention.

[0016] The transmission device for the developing machine in this embodiment includes: a plurality of transmission units 1, and the bearing points 12a of the multiple transmission units are arranged on the same plane to form a bearing surface for driving the substrate, wherein the multiple transmission units 1 arranged in...

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Abstract

The invention discloses a transmission device for a developing machine, comprising: a plurality of transmission units, the bearing points of which are arranged on the same plane to form a bearing surface for driving a substrate; the transmission unit includes: a supporting shaft and A roller attached to a supporting shaft having a central axis of rotation. The invention also discloses a developing machine. The developing machine and its transmission device implementing the present invention reduce the contact area between the developer nozzle and the transmission unit below it, reduce the probability of water film formation, and improve the problem of uneven development.

Description

technical field [0001] The invention relates to the field of display panel manufacturing, in particular to a developing machine and a transmission device thereof. Background technique [0002] In the production process of the TFT exposure process, the glass substrate is cleaned, coated with photoresist, dried under reduced pressure and soft baked, and then enters the exposure machine, using MASK to define patterns on the photoresist on the glass substrate; and then goes through the development process Graphics are displayed, and finally after hard baking, the photoresist is shaped and the glass substrate is produced. [0003] In the prior art, after the photoresist coating and exposure are completed, a development process will be carried out, the exposed photoresist will be developed, and the unexposed photoresist will remain on the substrate to form the pattern required by the process. In the way of TFT development, the developer nozzle is fixed above the machine to spit o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/30G03F7/20
CPCG03F7/30G03F7/3064G03F7/70733H01L21/67706B65H5/066B65H2404/1542B65H2404/15212B65H3/06B65H5/06B65H27/00
Inventor 齐鹏博陈叶凯
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD