Seed crystal holder structure of mono-crystal furnace
A seed crystal chuck, single crystal furnace technology, applied in the direction of single crystal growth, crystal growth, chemical instruments and methods, etc., can solve the problems of furnace floor breakdown, seed crystal fracture, etc. Large, high positioning concentricity effect
Pending Publication Date: 2018-03-09
ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL
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Problems solved by technology
As we all know, breaking the crystal during the pulling process of the single crystal furnace is the most troublesome thing in the use of the seed crystal. The cost of the seed crystal in the crystal pulling is very small, but if the seed crystal breaks the crystal, the loss is huge, including Silicon materials, quartz crucibles, graphite three-petal crucibles, and even thermal field, furnace bottom plate breakdown and other losses, ranging from tens of thousands to hundreds of thousands, broken crystals during the drawing process due to excessive feeding, mechanical stress, The structure of the seed crystal chuck is also a factor that cannot be ignored due to poor control of operational details such as reheating, pulling speed temperature, and seed crystal shearing.
[0003] The straight-through seed crystal cavity is fixed by inserting the molybdenum pin into the hole on the seed crystal. This method is subject to local force. When the crystal rod is too heavy, it is easy to cause the seed crystal to break
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[0024] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
[0025] Such as figure 1 The single crystal furnace seed chuck structure shown includes a weight 4 , a split sleeve 2 , a chuck sheath 3 , a seed crystal chuck 5 , and a tungsten wire rope 1 .
[0026] The main structure of the heavy hammer 4 is a cylindrical structure; the upper end of the heavy hammer 4 has a square through groove, and the length of the square through groove is set to be L1, and the height is H1; the center of the upper end of the heavy hammer 4 has a D through hole, The D through hole is connected to the square through groove, and the diameter of the D through hole is set to D; the lower end surface of the cylindrical surface of the main structure of the weight 4 transitions to the section M with an external thread through a trapezoidal inclined surface.
[0027] The open sleeve 2 is an "inverted T" cylindrical open sleeve. T...
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The invention relates to mono-crystal furnace equipment and aims to provide a seed crystal holder structure of a mono-crystal furnace. The structure includes: a hammer, an opening sleeve, a holder protective sleeve, a seed crystal holder, and a tungsten filament rope. The holder protective sleeve is aligned with the seed crystal through a conical surface, so that concentricity is high and force contact surface is large, and the seed crystal is not liable to fracture.
Description
technical field [0001] The invention relates to the field of single crystal furnace equipment, in particular to a single crystal furnace seed crystal chuck structure. Background technique [0002] Monocrystalline silicon is the main functional material for photovoltaic power generation and utilization of solar energy, and it is becoming more and more critical to the current information society. As we all know, breaking the crystal during the pulling process of the single crystal furnace is the most troublesome thing in the use of the seed crystal. The cost of the seed crystal in the crystal pulling is very small, but if the seed crystal breaks the crystal, the loss is huge, including Silicon materials, quartz crucibles, graphite three-petal crucibles, and even thermal field, furnace bottom plate breakdown and other losses, ranging from tens of thousands to hundreds of thousands, broken crystals during the drawing process due to excessive feeding, mechanical stress, The stru...
Claims
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IPC IPC(8): C30B15/32C30B29/06
CPCC30B15/32C30B29/06
Inventor 傅林坚曹建伟孙明倪军夫沈兴潮叶钢飞
Owner ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL