Protection device for cut-off valve of extremely-high vacuum calibration system

Abstract

The invention discloses a protection device for a cut-off valve of an extremely-high vacuum calibration system. The protection device is mounted in front of an air inlet of the cut-off valve of the extremely-high vacuum calibration system and comprises connecting flanges, a shell, an electrostatic generator, a deflection electric field upper electrode, a deflection electric field lower electrode,a core column flange, a block electric field upper electrode, a block electric field lower electrode and an electronic control system. The electrostatic generator is responsible for generating staticelectricity to enable pollutants entering the shell to be charged; the deflection electric field upper electrode and the deflection electric field lower electrode are arranged in the shell and are responsible for generating a radial electric field, and thus the charged pollutants are deflected and deposited on the deflection electric field lower electrode; and the block electric field upper electrode and the block electric field lower electrode are arranged in the shell, are responsible for generating a radial and axial combined block electric field, and used for blocking the pollutants whichdo not deposited on the deflection electric field to pass through an air outlet of the protection device and depositing the pollutants on the deflection electric field lower electrode and the block electric field lower electrode again. The problem that after the extremely-high vacuum calibration system is exposed to the atmosphere, due to atmospheric pollution, the performance of the extremely-high vacuum cut-off valve is likely to be lowered, and even the extremely-high vacuum cut-off valve is likely to lose efficacy are solved.

Description

technical field [0001] The invention relates to a protection device used in an extremely high vacuum system for protecting the sealing performance of an extremely high vacuum cut-off valve. Background technique [0002] The extremely high vacuum system has high leakage rate performance requirements for the globe valve used in it. The sealing method of the globe valve used in the extremely high vacuum system mostly adopts the metal sealing method, which leads to the high cleanliness of the sealing surface. Once the sealing surface is polluted by foreign impurities, it will directly affect the sealing effect of the globe valve (that is, the leakage rate after closing the valve). Usually, the extremely high vacuum system is installed in the clean room, and after the installation is completed, it will generally not be installed again. The system is exposed to the atmosphere to prevent contamination. [0003] However, with the development of the current calibration technology, s...

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Problems solved by technology

[0004] In view of this, the present invention provides a protection device for the cut-off valve of the extremely high vacuum calibration system, which solves the problem that the performance of the very high vacuum cut-off valve may decrease or even fail due to atmospheric pollution after the extremely high vacuum calibration system is exposed to the atmosphere

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