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Energy conversion device and method of forming the same

An energy conversion device and cavity technology, applied in chemical instruments and methods, fuel cell shapes/forms, fuel cells, etc., can solve problems such as limiting electrochemical action area, battery damage, diaphragm failure, etc.

Active Publication Date: 2018-03-23
NANYANG TECH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

A 50 nm thick free-standing YSZ separator is typically limited to a lateral scale of only a few hundred micrometers, which limits the available electrochemical interaction area
In particular, cells near each corner experiencing the highest stress concentration can be damaged, causing the diaphragm to fail during fuel cell operation

Method used

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  • Energy conversion device and method of forming the same
  • Energy conversion device and method of forming the same
  • Energy conversion device and method of forming the same

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Embodiment approach

[0086] The following detailed description refers to the accompanying drawings, which show by way of example specific details and embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments may be utilized and structural and logical changes may be made without departing from the scope of the present invention. The various embodiments are not necessarily mutually exclusive, as some embodiments can be combined with one or more other embodiments to form new embodiments.

[0087] In various embodiments, methods of forming energy conversion devices may be provided. figure 1 is a diagram 100 demonstrating a method of forming an energy conversion device that may be provided in accordance with various embodiments. The method may include forming an electrolyte layer on a first surface of a semiconductor substrate at 102 . The method may also include forming ca...

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Abstract

Various embodiments may provide a method of forming an energy conversion device. The method may include forming an electrolyte layer on the first surface of the semiconductor substrate. The method mayalso include forming a cavity on the second surface of the semiconductor substrate using a deep reactive ion etch. The method may further include enlarging said cavity by carrying out one or more wetetches so that the enlarged cavity is at least partially defined by a vertical arrangement comprising a first lateral cavity surface of the semiconductor substrate extending substantially along a first direction, and a second lateral cavity surface of the semiconductor substrate adjoining the first lateral cavity surface. The method may include forming a first electrode on a first surface of theelectrolyte layer, and forming a second electrode on a second surface of the electrolyte layer.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to Singapore application 10201504046S filed on 22 May 2015, the contents of which are hereby incorporated by reference in their entirety into this application. 【Technical field】 [0003] Various aspects of the present disclosure relate to energy conversion devices and methods of forming the same. 【Background technique】 [0004] Solid oxide fuel cells (SOFCs) are efficient energy conversion devices that can flexibly choose hydrocarbon fuels. At present, reducing the thickness of the electrolyte to reduce the ohmic resistance has been an effective way to further improve the performance of SOFCs at low operating temperatures below 500°C. To drastically reduce the thickness of the electrolyte to the nanoscale, SOFCs have successfully exploited silicon-based microfabrication processes using chemical etching. [0005] Thin-film electrolytes with nanoscale thicknesses between 50 and 150 nm h...

Claims

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Application Information

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IPC IPC(8): H01M8/1253H01M8/1286H01M8/2432C09K13/02
CPCH01M8/1286H01M8/006H01M2008/1293H01M8/2432C09K13/02H01M8/1253Y02E60/50Y02P70/50H01M4/8871
Inventor 苏培珍尹勇轸白宗大
Owner NANYANG TECH UNIV
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