Optical fiber temperature and pressure composite sensor

A composite sensor, optical fiber temperature technology, used in instruments, measuring devices, special recording/indicating devices, etc., can solve the problems of difficult high-precision measurement and signal quality degradation, and achieve the measurement and simplification of dynamic pressure and temperature signals. The steps of data processing and the effect of simple overall structure

Inactive Publication Date: 2018-03-27
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that the signal quality is degraded and it is difficult to realize high-precision measurement in the prior art, and to provide a Fabber-type optical fiber temperature and pressure composite sensor, which uses a relatively simple and compact structure to simultaneously realize temperature and pressure measurement high-precision measurement

Method used

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  • Optical fiber temperature and pressure composite sensor
  • Optical fiber temperature and pressure composite sensor
  • Optical fiber temperature and pressure composite sensor

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Embodiment 1

[0032] Such as figure 1 As shown, the optical fiber temperature and pressure composite sensor 26 is composed of a pressure sensing cavity 1 , a temperature sensing substrate 2 , a quartz hollow tube 3 and a transmission optical fiber 4 . Such as figure 2 As shown, the pressure sensing chamber 1 is made of single crystal silicon, which is a square piece of 1.8mm×1.8mm, the upper surface 5 of the pressure sensing chamber is a plane for diffuse reflection treatment, and the lower surface 6 of the pressure sensing chamber is The pressure-sensing cavity 7 is processed into a circular shallow pit with a radius of 650 μm. The upper surface 5 of the pressure-sensing cavity and the bottom surface 8 of the pressure-sensing cavity constitute the upper and lower surfaces of the pressure-sensing diaphragm 9. The thickness of the pressure-sensing diaphragm 9 is 50 μm. The depth d of the pressure cavity 7 is the length 10 of the pressure sensitive cavity, and d=20 μm. The temperature-sens...

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Abstract

The invention relates to an optical fiber temperature and pressure composite sensor, in particular to an optical fiber temperature and pressure composite sensor which can be used for simultaneous measurement of the temperature, absolute pressure or relative pressure of liquid and gas, and belongs to the field of optical fiber sensing technology. The sensor realizes simultaneous measurement of thetemperature and pressure through a simple two-layer structure, a transmission optical fiber with collimated microlenses on its end faces is used to enhance the signal quality of the sensor, two spectral analysis modules containing optical wedges with different thicknesses are used to demodulate a pressure sensing cavity length and a temperature sensing cavity length respectively, interference signals of the two cavities are separated through the one-to-one correspondence between the wedge thicknesses and the cavity lengths, in this way, the data processing steps are simplified, the demodulation speed is increased, and the measurement of dynamic pressure and temperature signals facilitated.

Description

technical field [0001] The invention relates to an optical fiber temperature and pressure composite sensor, in particular to an optical fiber temperature and pressure composite sensor, which can be used for simultaneous measurement of liquid and gas temperature, absolute pressure or relative pressure, and belongs to the technical field of optical fiber sensing. Background technique [0002] Optical fiber pressure sensors based on the Fabry-Perot interference principle have the characteristics of small size, light weight, and high sensitivity. Especially, diaphragm-type optical fiber pressure sensors manufactured by MEMS technology have become a research hotspot in recent years. The basic measurement principle of this type of sensor is usually to form a Fabry-Perot interference cavity through the end face of the optical fiber and the surface of the diaphragm. When the pressure causes the diaphragm to deform, the cavity length of the Fabry-Perot interference cavity changes. ad...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02G01D3/036
CPCG01D21/02G01D3/036
Inventor 隋广慧江琴陈爽张慧君张欣颍
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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