Automatic data collection method used for spectral analysis photoelectron/low-energy electronic microscope

An electron microscope and data acquisition technology, applied in the direction of electrical digital data processing, special data processing applications, instruments, etc., can solve the problems of difficult identification of data, low efficiency, inconvenient management, etc., and achieve a reasonable file structure, which is conducive to equipment adjustment, Easy to identify the effects of management

Inactive Publication Date: 2018-03-27
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

SPELEEM control software comes with simple data acquisition programs for users to use, but these programs have the following shortcomings: the naming method of data storage cannot reflect the relevant information of the experiment, and the file structure is not clear enough, making the batch collected data difficult to identify and inconvenient to manage ; During continuous scanning, only the image column itself is stored, but the parameters of the microscope and CCD camera, as well as the parameter changes during the scanning process are not stored, and can only rely on handwriting to record several main parameters, which is inefficient and inevitable. This is not conducive to subsequent data review and analysis, and it is not convenient to compare parameters for equipment adjustment

Method used

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  • Automatic data collection method used for spectral analysis photoelectron/low-energy electronic microscope
  • Automatic data collection method used for spectral analysis photoelectron/low-energy electronic microscope

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Embodiment Construction

[0024] The present invention will be further described in detail below in conjunction with the embodiments.

[0025] The invention automatically controls SPELEEM equipment to collect experimental data by writing a VBscript script program, which is time-saving and efficient, and can facilitate data management, analysis and equipment adjustment, and can better realize the common functions of the equipment. The VBscript script program is written and debugged in the script editor provided by the SPELEEM control software. It makes full use of the methods and attributes provided by the device control software, as well as the FileSystemObject (FSO) object of the Windows system. It is simple and easy to install other software without additional software.

[0026] The whole system includes a set of Elmitec-SPELEEM equipment, a computer running Windows7 operating system and SPELEEM control software LEEM2000, U-view2002. Among them, LEEM2000 is the microscope control software, used to adjust ...

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Abstract

The invention relates to an automatic data collection method used for a spectral analysis photoelectron / low-energy electronic microscope. The method comprises the following steps of setting scanning parameters and CCD camera parameters, and establishing a folder and files in a selected data storage path; and automatically controlling the electronic microscope and a CCD to collect an image, and recording device and experimental parameters related to the image at the same time. According to a unified storage naming rule, experimental data and the related parameters are orderly stored; the filesare reasonable in structure and easy to identify and manage; and data analysis, review and device adjustment are facilitated.

Description

Technical field [0001] The invention relates to an automatic control data acquisition method for spectrum analysis photoelectron / low energy electron microscope (SPELEEM, Elmitec company), which belongs to computer automatic control technology. Background technique [0002] Spectral Analysis Photoelectron / Low Energy Electron Microscope (SPELEEM) is a powerful surface and nanometer scientific research equipment. It collects photoelectrons excited from the surface or electrons reflected by the electron gun on the surface for imaging. Equipped with an energy analyzer It also has energy spectrum analysis capabilities. SPELEEM can obtain comprehensive information of morphology, structure, chemical composition and electronic structure with its functions in real-time imaging, diffraction, photoelectron spectroscopy, element resolution and micro-area analysis. Our SPELEEM is the most widely used product of German Elmitec in this field. The commonly used functions of SPELEEM (such as LEE...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/30
CPCG06F16/13G06F16/164
Inventor 张冠华孙巨龙金艳玲杨学明
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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