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Manufacturing apparatus for flexible electronics

A technology for flexible substrates and separation equipment, applied in the fields of final product manufacturing, sustainable manufacturing/processing, semiconductor/solid-state device manufacturing, etc.

Active Publication Date: 2018-03-27
ROYOLE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it has been a challenge to properly control the adhesion force between the flexible substrate and the rigid carrier to facilitate mechanical separation, while still maintaining a sufficiently strong connection of the flexible substrate to the rigid carrier to support the display manufacturing process.

Method used

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  • Manufacturing apparatus for flexible electronics
  • Manufacturing apparatus for flexible electronics
  • Manufacturing apparatus for flexible electronics

Examples

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Embodiment Construction

[0024] According to various embodiments of the present application, the flexible substrate adheres to the rigid carrier sufficiently firmly so that thin film transistor (TFT) devices and corresponding display devices can be fabricated on the flexible substrate when the flexible substrate is supported by the rigid carrier. After forming the TFT devices and corresponding display devices, the flexible substrate needs to be separated from the rigid carrier without causing any damage to the TFT devices and corresponding display devices formed thereon. According to various embodiments of the present application, the separation device is designed to facilitate separation of the flexible substrate. The separation device operates based on vacuum adsorption; it consists of panels, rods and rod shafts. The panel is used for vacuum suction, and includes a plurality of vacuum suction holes located on the bottom surface of the panel and distributed across the bottom surface. A rod is mecha...

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Abstract

This application discloses a method of forming a flexible substrate using a detachment apparatus. The flexible substrate includes a debonding region, and one or more edge regions located in proximityto one or more edges of the flexible substrate. The detachment apparatus detaches the one or more edge regions of the flexible substrate from a rigid carrier that is configured to support the flexiblesubstrate device, and detach the debonding region of the flexible substrate from the rigid carrier to which a bottom surface of the debonding region is configured to adhere. Specifically, the detachment apparatus detaches the debonding region by contacting the top surface of the flexible substrate at a plurality of suction locations located on the debonding region of the flexible substrate, and applying detachment force at the plurality of suction locations to peel the flexible substrate off the rigid carrier.

Description

technical field [0001] The present application relates generally to flexible substrates for electronic devices, and more particularly to flexible substrate structures, related manufacturing methods and processing equipment that enable the integration of flexible substrates with rigid carriers after manufacturing electronic devices on flexible substrates with the support of rigid carriers easy to separate. Background technique [0002] Thin and flexible electronic displays are of great value in wearable devices, e-newspapers, smart ID cards, and other consumer electronics. Such flexible electronic displays have been realized in active-matrix organic light-emitting diode (AMOLED) displays. Specifically, in an AMOLED display, a thin film transistor (TFT) device is fabricated on a flexible substrate by arranging a thin film of an active semiconductor layer together with an insulating dielectric layer and metal electrodes. The flexible substrate is temporarily attached to a rig...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H01L51/00H01L27/12H10K99/00
CPCY02E10/549H01L27/1218H01L27/1266Y10S156/941Y10T156/1132Y10T156/1978Y10T156/1168Y10S156/93Y10T156/1944Y02P70/50H10K71/80H10K77/111H10K2102/311H10K59/12Y10T156/1111H10K71/00H10K99/00H10K59/1201H01L27/12
Inventor 余晓军袁泽魏鹏刘自鸿
Owner ROYOLE
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