Method and device for calibrating aiming signal light modulation of dynamic photoelectric microscope
A technology of photoelectric microscope and calibration method, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of accuracy influence, and achieve the effect of improving accuracy, facilitating high precision, and optimizing the marking measurement system.
Active Publication Date: 2018-05-08
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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Problems solved by technology
[0003] The purpose of the present invention is to solve the problem that the dynamic characteristics of the aiming signal of the existing dynamic photoelectric microscope affect the precision of its aiming trigger measurement, and the problem that the calibration verification must use an actual precision displacement measurement device to assist the work, and to provide a dynamic photoelectric microscope aiming signal light modulation Calibration method and device
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[0027] Aiming signal light modulation calibration method and device of dynamic photoelectric microscope, composed of control and information processing module 1, frequency modulation control module 2, optical output module 3, optical receiving module 4, dynamic photoelectric microscope 5; the calibration method and device will frequency modulated The light intensity is used to obtain the aiming signal, and the dynamic photoelectric microscope adopts the double reticle method, and selects monochromatic light (red) light-emitting diodes. The calibration device adopts light intensity frequency conversion modulation method to measure the dynamic performance of the photoelectric microscope aiming signal. Firstly, the calibration device adopts a fixed structure, and the input light intensity is controlled by modulating the frequency, and the dynamic characteristics of the dynamic photoelectric microscope are obtained by combining the light intensity of various frequencies. According...
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The invention relates to a method and device for calibrating aiming signal light modulation of a dynamic photoelectric microscope, and belongs to the technical field of photoelectric measurement. Themethod comprises the steps that adjustable bell-shaped wave electric signals are loaded to a light-emitting electronic device to generate signal light; the signal light is divided into two identical paths, one path of the signal light is converted into electric signals, and the converted electric signals are transmitted to an upper computer; the other path of the signal light is transmitted to thedynamic photoelectric microscope, and the dynamic photoelectric microscope outputs electric signals and transmits the electric signals to the upper computer; and calibration is realized by perform comparison on the two path of electric signals. The device comprises a control and information processing module, a frequency modulation control module, an optical output module, an optical receiving module and a dynamic photoelectric microscope, namely, a calibration object. The method and device are used for solving a problem of dynamic calibration for aiming trigger of the existing dynamic photoelectric microscope, have good adaptability and an evaluation ability for synchronous measurement and aiming measurement and can complete dynamic characteristic calibration for aiming trigger signals of the dynamic photoelectric microscope under the condition of a stable position structure.
Description
technical field [0001] The invention relates to a dynamic photoelectric microscope aiming signal light modulation calibration method and device, belonging to the field of photoelectric measurement technology. Background technique [0002] Dynamic photoelectric microscope aiming method is an important unit technology in precision measurement, especially when displacement and angle are used as measurement objects. As a representative of non-contact measurement, photoelectric aiming method has fast response speed, good repeatability, and no damage to the measured object, etc. advantage. Photoelectric microscope measurement is widely used in the field of precision measurement technology for reticles. It is an important means to achieve high-precision measurement at present, and it is of great significance to the measurement of parameters such as line patterns and reticles in length measurement. During the dynamic measurement of the photoelectric microscope, there are errors suc...
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IPC IPC(8): G01B11/26G01B11/02
Inventor 朱振宇李华丰任冬梅王霁李强
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA