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Sample stage, microscopic observation device and sample stage adjustment method

A technology of observation device and adjustment method, applied in the direction of measuring devices, instruments, measuring instrument components, etc., can solve the problem that the spatial position of the sample cannot be changed, and achieve the effect of simple structure, wide application range, and convenient observation

Active Publication Date: 2020-03-06
香港城市大学深圳研究院
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Problems solved by technology

[0005] In order to solve the problem that the existing sample stage cannot change the spatial position of the sample, the present invention provides a sample stage, a microscopic observation device and a method for adjusting the sample stage. Imaging instruments (such as scanning electron microscope SEM, optical microscope OM, atomic force microscope AFM, etc.) are used together to perform in-situ rotation and observation of the test piece

Method used

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  • Sample stage, microscopic observation device and sample stage adjustment method
  • Sample stage, microscopic observation device and sample stage adjustment method
  • Sample stage, microscopic observation device and sample stage adjustment method

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Embodiment Construction

[0027] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0028] In a space rectangular coordinate system with X, Y, and Z coordinate axes, the sample stage includes a rotating motor 3 sequentially connected along the Z coordinate axis, a connecting module 4 between the rotating motor and a horizontal linear motor, a horizontal linear motor 5, and a horizontal linear motor. Motor slider 6, horizontal linear motor and vertical linear motor connection module 7, vertical linear motor 8, vertical linear motor slider 9 and stage 12; the axis of the rotating motor 3 coincides with the Z coordinate axis, and the rotating motor 3 can drive the rotation The motor and horizontal linear motor connection module 4 and the horizontal linear motor 5 rotate around th...

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Abstract

The invention provides a sample platform, a microscopic observation device and a sample platform adjusting method. The sample platform comprises a rotating motor (3), a rotating motor and horizontal linear motor connecting module (4), a horizontal linear motor (5), a horizontal linear motor sliding block (6), a horizontal linear motor and vertical linear motor connecting module (7), a vertical linear motor (8), a vertical linear motor sliding block (9) and an object stage (12) which are sequentially connected along the Z-axis direction. The sample platform not only can change the spatial position of a sample, but also can be used by being matched with microscopic imaging instruments such as a scanning electron microscope SEM, an optical microscope OM, an atomic force microscope AFM so as to perform an in-situ rotating operation and observation on a tested piece. The sample platform and the microscopic observation device are simple in structure, can perform testing on various sizes of samples, and are high in adaptability, compact in space structure and convenient to observe.

Description

technical field [0001] The invention relates to the field of microscopic observation equipment, in particular to a sample stage, a microscopic observation device containing the sample stage, and a method for adjusting the sample stage of the microscopic observation device. Background technique [0002] With the development of technology, the observation and manipulation of micro samples are widely used in aerospace, automobile industry, semiconductor, biomedicine, MEMS, polymer, solar energy / fuel cell chemical industry, petroleum, rock, microelectronics, micro sensor, semiconductor Materials, automatic control, aerospace, automotive industry and machine tools. [0003] There is a big difference between manipulating a sample under a high-magnification microscope and macroscopically. In order to organically combine microscopic manipulation technology with observation, handling and processing of microscopic samples, academia and engineering circles are researching some microma...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D11/00G01Q30/20G01N21/01
CPCG01D11/00G01N21/01G01Q30/20
Inventor 申亚京陆豪健
Owner 香港城市大学深圳研究院
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