Full-automatic base plate size detection equipment and base plate detection line and detection method of base plate detection line
A fully automatic technology for detecting substrates, applied in semiconductor/solid-state device testing/measurement, measuring devices, instruments, etc., can solve problems such as unguaranteed dimensional accuracy, and achieve the effect of quality improvement
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[0033] The embodiments described below with reference to the accompanying drawings are exemplary, and are only used to explain the present invention, and cannot be construed as limiting the present invention.
[0034] The embodiment of the present invention: such as figure 1 with image 3 As shown, a fully automatic substrate size detection equipment includes a main frame 1, a carrying plate 2, a conveyor belt 3, a door-type walking mechanism 4 and a laser sensor 5. There are multiple carrying plates 2 fixed on the main frame 1 at equal intervals , A conveyor belt 3 is provided between two adjacent bearing plates 2, and the conveying direction of the conveyor belt 3 is parallel to the length of the bearing plate; the bearing plates 2 on both sides are provided with walking rails 6 arranged along the length of the bearing plate 2, The gantry walking mechanism 4 is installed on the walking track 6, and the laser sensor 5 is installed on the gantry walking mechanism 4 through the thi...
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