Full-automatic base plate size detection equipment and base plate detection line and detection method of base plate detection line
A fully automatic technology for detecting substrates, applied in semiconductor/solid-state device testing/measurement, measuring devices, instruments, etc., can solve problems such as unguaranteed dimensional accuracy, and achieve the effect of quality improvement
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[0033] The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0034] Embodiments of the present invention: as figure 1 with image 3 As shown, a fully automatic substrate size detection equipment includes a main frame 1, a carrying plate 2, a conveyor belt 3, a door-type traveling mechanism 4 and a laser sensor 5, and there are multiple carrying plates 2 fixed on the main frame 1 at equal intervals. A conveyor belt 3 is arranged between two adjacent load plates 2, and the transmission direction of the conveyor belt 3 is parallel to the length direction of the load plate; the load plate 2 on both sides is provided with a walking track 6 arranged along its length direction, The portal traveling mechanism 4 is installed on the walking track 6, and the laser sensor 5 is installed on the portal traveling mechanism 4 through the third traveling mechanism 10....
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