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Method and apparatus for generating plasma or laser pulses by means of radiofrequency excitation pulses, in particular a gas-discharge laser, and a control unit for a radiofrequency excitation pulse generator

A technology of pulse generator and high-frequency excitation, which is applied in the direction of plasma, laser, laser parts, etc., can solve the problem of the decline of the income of the second excitation pulse sequence, and achieve the effect of simple and dynamic control technology

Active Publication Date: 2018-06-08
TRUMPF LASERSYST FOR SEMICON MFG
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Problems solved by technology

According to DE 11 2013 002 021 T5, the reason for the difference is the heat input into the laser medium by the first excitation pulse sequence, for which reason the yield of the second excitation pulse sequence decreases

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  • Method and apparatus for generating plasma or laser pulses by means of radiofrequency excitation pulses, in particular a gas-discharge laser, and a control unit for a radiofrequency excitation pulse generator
  • Method and apparatus for generating plasma or laser pulses by means of radiofrequency excitation pulses, in particular a gas-discharge laser, and a control unit for a radiofrequency excitation pulse generator
  • Method and apparatus for generating plasma or laser pulses by means of radiofrequency excitation pulses, in particular a gas-discharge laser, and a control unit for a radiofrequency excitation pulse generator

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Embodiment Construction

[0046] figure 1 A device 1 for generating plasma pulses or laser pulses by means of radio-frequency excitation pulses is shown, which is designed as an energized CO 2 Gas discharge lasers. The gaseous laser medium 2 circulates through the resonance space 3 , in which the laser medium 2 can be excited by means of a radio-frequency excitation electrode 4 for emitting laser pulses. The laser medium 2 consists essentially of carbon dioxide, nitrogen and helium, for example in a mixing ratio of 5.5:29:65.5. The resonance space 3 is delimited by two (not shown) mirrors (inverse coupling mirrors or outcoupling mirrors).

[0047] The laser pulses have, for example, a wavelength of 10.6 μm. Laser pulses can be generated with a pulse duration of 0.5 μs to 50 μs and a pulse spacing of 10 μs to 25 ms. The radio-frequency excitation pulse is at a frequency in the MHz range, in particular at a frequency of 10 MHz to 15 MHz. Modulation of high-frequency excitation pulses is achieved by ...

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Abstract

The invention relates to a method for producing plasma or laser pulses (14) by means of radiofrequency excitation pulses (13), wherein a medium is excited by radiofrequency excitation pulses (13) formeeting plasma or laser pulse specifications (11). The radiofrequency excitation pulses (13) are set at least partly dependent on a preceding radiofrequency excitation of the medium. The radiofrequency excitation pulses (13) are set at least in part in such a way that the radiofrequency excitation pulses (13) become ever stronger, in particular are shortened by way of changing the start and / or endtimes thereof, as a residual excitation of the medium by the preceding radiofrequency excitation increases. Furthermore, the invention relates to a control unit for a radiofrequency excitation pulsegenerator, a radiofrequency excitation pulse generator and an apparatus for generating plasma or laser pulses (14) by means of radiofrequency generation pulses (13), in particular a gas-discharge laser.

Description

technical field [0001] The invention relates to a method and a device, in particular a gas discharge laser, for generating plasma pulses or laser pulses by means of radio-frequency excitation pulses, wherein a medium is excited by means of radio-frequency excitation pulses in order to satisfy plasma pulse or laser pulse presets. Furthermore, the invention relates to a control unit for a radio-frequency excitation pulse generator and a radio-frequency excitation pulse generator with such a control unit. Background technique [0002] It is known that changes in the laser medium occur during the generation of laser pulses, which changes, for example, have an effect on the power of the generated laser pulses. This means that the same excitation pulse does not always lead to the same output laser pulse with the same laser beam generator. [0003] A known measure is the so-called “simmering” in order to increase the influence of the modified laser medium on the reproducibility of...

Claims

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Application Information

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IPC IPC(8): H05H1/46H01S3/134H01S3/10
CPCH01S3/134H05H1/46H01S3/10046H01S3/0971H01S3/10038H01S3/2232H01S3/09702H05H2242/20
Inventor R·舒尔茨T·贝克
Owner TRUMPF LASERSYST FOR SEMICON MFG
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