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A Dynamically Deformable Controllable Micromirror

A dynamic deformation and controllable micromirror technology, applied in the field of micro-electromechanical systems, can solve the problems of slow speed, high cost, and large volume, and achieve the effects of reducing transmission, suppressing spot distortion, and simplifying complex structures

Active Publication Date: 2022-01-11
WUXI INFISENSE PERCEPTION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional lidar uses multiple lasers combined with the design of mechanical rotating structure, which is not only slow and bulky, but also high energy consumption and high cost

Method used

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  • A Dynamically Deformable Controllable Micromirror
  • A Dynamically Deformable Controllable Micromirror
  • A Dynamically Deformable Controllable Micromirror

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Such as figure 1 In the lidar system shown, the outgoing light and the echo signal share the same optical path. A laser 1 emits a laser beam 2 which is reflected onto a detection target 4 via a micromirror 3 . A reflected light beam is formed at the detection target, returns along the original optical path, and is reflected to the light-receiving surface of the photodetector 9 via the micromirror 3 and the relay optical path.

[0037] The laser 1 may be a semiconductor edge emitting laser, a vertical surface cavity emitting semiconductor laser, a fiber laser, or the like.

[0038] The micromirror 3 can be a micromirror with controllable dynamic deformation. Depending on the specific design, it can be a one-dimensional or two-dimensional scanning micromirror, and its driving method can be electrostatic drive, electromagnetic drive, electrothermal drive or piezoelectric drive.

[0039] The laser beam 2 is reflected by the detection object 4 and received by the micromirr...

Embodiment 2

[0041] In the lidar system described in Embodiment 1, the micromirror 3 is an important optical relay component and scanning device in the optical path. On the one hand, the size of the reflection surface of the micromirror 3 defines the maximum reflection area; on the other hand, the micromirror 3 realizes the scanning of the light beam based on its own scanning structure.

[0042] In the present embodiment two, the basic structure of the mirror surface of the micromirror 3 is as follows: figure 2 As shown, it includes an outer mirror 10 and an inner mirror 11. The inner mirror 11 is connected to the outer mirror 10 via a connecting mechanism 12, and the outer mirror 10 is connected to an external fixed anchor point through a torsion shaft 13. The outer mirror 10, the inner mirror 11 and the connection mechanism 12 form a whole to rotate around the rotation axis, and the connection mechanism 12 is symmetrically distributed about the rotation axis of the micromirror.

[0043...

Embodiment 3

[0046] exist figure 2 A structure of the micromirror 3 is shown in , in which the inner mirror 11 is rotated about the axis of rotation. During the rotation and oscillation process, the natural rotational frequency of the micromirror as a whole is determined by the total moment of inertia of the micromirror and the stiffness coefficient of the torsion axis 13 . Therefore, by adjusting the shape and size of the connecting mechanism 12, the overall rotation frequency of the micromirror is much lower than the natural frequency of the vibrator formed by the connecting mechanism 12 and the inner mirror 11. The size of the connecting mechanism 12 can be adjusted by adjusting the first width ( H1 ) and the first distance ( L1 ), and the shape of the connecting mechanism 12 can be formed by changing the etched pattern.

[0047] exist image 3 In the micromirror structure shown, four arc-shaped grooves are etched on the same circumference on the SOI with the center of the inner mirr...

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Abstract

The present invention relates to a dynamic deformation controllable micromirror, and the micromirror comprises: an outer mirror, the outer mirror has a first structure; an inner mirror, the outer mirror has a second structure; the first structure and the second structure The structures are separated from each other and connected by a connecting mechanism having a third structure; the first structure, the second structure and the third structure are an integral structure formed by etching a groove having a fourth structure on the surface of the wafer. Based on the separation structure of the inner and outer mirrors, the influence of the dynamic deformation of the outer mirror on the inner mirror can be effectively reduced, thereby minimizing the dynamic deformation of the inner mirror. The connection mechanism can be placed at the place where the dynamic deformation of the outer mirror surface is small, so as to effectively reduce the transmission of dynamic deformation. The connection mechanism can be in many different shapes, and has a large degree of design freedom.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical systems (MEMS: Micro-electromechanical Systems), in particular to a dynamic deformation controllable micromirror. Background technique [0002] LiDAR is a high-precision distance measurement device. As an active detection device, lidar is not affected by day and night and has strong anti-interference ability. In addition to applications in fields such as terrain mapping, it has also attracted great attention in the fields of autonomous driving and drones in recent years. Traditional lidar uses multiple lasers combined with the design of mechanical rotating structure, which is not only slow and bulky, but also high energy consumption and high cost. Using a micromirror instead of a mechanical rotating structure can greatly reduce the size of the device, increase the scanning frequency, and consume less energy. In addition, since the micromirror can form a one-dimensional scanning ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01S7/481G01S17/02
CPCG01S7/4817G01S17/02
Inventor 虞传庆王鹏陈文礼王宏臣孙丰沛董珊
Owner WUXI INFISENSE PERCEPTION TECH CO LTD