Device for producing cyclized polyisoprene resist

A technology for polyisoprene and production equipment, which is applied in the field of production equipment for cyclized polyisoprene resists, and can solve complex and other problems

Inactive Publication Date: 2018-07-03
CHENGDU WEI ER BO DUN TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Most of the existing production devices are relatively complicated. Cyclized polyisoprene is used as an integrated circuit resist. The pr

Method used

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  • Device for producing cyclized polyisoprene resist
  • Device for producing cyclized polyisoprene resist
  • Device for producing cyclized polyisoprene resist

Examples

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example 1

[0008] Production raw materials and dosage

[0009]

[0010] The production equipment of cyclized polyisoprene resist mainly includes: polymerization vessel (D101), cyclization vessel (D102), washing tower (E101), concentrator (F101), glue mixing vessel (D103), filtration (M101), in which the washing tower (E101) is connected to the cyclization reactor (D102) and the concentrator (F101), and the glue mixing reactor (D103) is connected to the concentrator (F101) and the filter (M101). Among them, the nominal volume of the polymerization reactor (D101) is 630L, the jacket capacity of the cyclization reactor (D102) is 570L, and the outer pot diameter of the glue reactor (D103) is 1200mm.

[0011] The production device of the cyclized polyisoprene resist, the production process is: adding high-purity isoprene into the polymerizer D101, then adding the dehydrated and refined xylene, and dissolving under stirring. Add the initiator butyl lithium, control the temperature to 70°C, and car...

example 2

[0015] Production raw materials and dosage

[0016]

[0017] The production equipment of cyclized polyisoprene resist mainly includes: polymerization vessel (D101), cyclization vessel (D102), washing tower (E101), concentrator (F101), glue mixing vessel (D103), filtration (M101), in which the washing tower (E101) is connected to the cyclization reactor (D102) and the concentrator (F101), and the glue mixing reactor (D103) is connected to the concentrator (F101) and the filter (M101). Among them, the nominal volume of the polymerization reactor (D101) is 660L, the jacket capacity of the cyclization reactor (D102) is 590L, and the outer pot diameter of the glue reactor (D103) is 1300mm.

[0018] The production device of the cyclized polyisoprene resist, the production process is: adding high-purity isoprene into the polymerizer D101, then adding the dehydrated and refined xylene, and dissolving under stirring. Add the initiator butyl lithium, control the temperature to 76°C, and car...

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Abstract

Provided is a device for producing cyclized polyisoprene resist. The device mainly comprises: a polymerization kettle (D101), a cyclization kettle (D102), a washing tower (E101), a concentrator (F101), a glue preparation kettle (D103) and a filter (M101), wherein the washing tower (E101) is connected with the cyclization kettle (D102) and the concentrator (F101) respectively, the glue preparationkettle (D103) is connected with the concentrator (F101) and the filter (M101) respectively, and the polymerization kettle (D101) has a nominal capacity of 630-660 L.

Description

Technical field [0001] The present invention relates to a compound synthesis device, in particular to a production device for cyclized polyisoprene resist. Background technique [0002] Cyclized polyisoprene resist is mainly used for micro processing in medium and large-scale integrated circuits, power tubes, and precision machinery manufacturing. Most of the existing production devices are relatively complicated. As the cyclized polyisoprene is used as a resist for integrated circuits, the advantages and disadvantages of the production devices have important economic significance for improving product quality and reducing by-product content. Summary of the invention [0003] The purpose of the present invention is to provide a production device for cyclized polyisoprene resist, which mainly includes: polymerization vessel (D101), cyclization vessel (D102), washing tower (E101), concentrator (F101), glue The kettle (D103) and filter (M101), among which the washing tower (E101) is...

Claims

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Application Information

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IPC IPC(8): C08F136/08C08F8/48
CPCC08F136/08C08F8/48
Inventor 刘洋
Owner CHENGDU WEI ER BO DUN TECH CO LTD
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