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Method and device for measuring reflective surface shape based on two-dimensional optical lattice

A measurement method, reflective technology, applied in the field of optical measurement, can solve the problems of low measurement flexibility and measurement range limitation, and achieve the effect of simplified measurement process, strong adaptability and simplified measurement process

Active Publication Date: 2020-02-21
TIANJIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the structure of the microlens is fixed, its measurement range is also limited, and the measurement flexibility is not high

Method used

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  • Method and device for measuring reflective surface shape based on two-dimensional optical lattice
  • Method and device for measuring reflective surface shape based on two-dimensional optical lattice
  • Method and device for measuring reflective surface shape based on two-dimensional optical lattice

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Embodiment Construction

[0045] The inventive idea of ​​the reflective surface shape measurement method and device based on the two-dimensional optical lattice of the present disclosure is that the emitted light modulated by the spatial light modulator and two-lens Fourier transform are respectively on the reflective measured surface and the reference plane An optical lattice is formed. The optical lattice on the measured surface is offset relative to the reference plane after being modulated by the surface shape of the measured surface. According to the offset, the pattern reconstruction algorithm based on Zernike polynomials is used to reconstruct the measured surface Surface shape.

[0046] The principle of surface shape measurement based on the optical lattice in the present disclosure is as follows:

[0047] image 3 This is the geometric model diagram of the surface shape measurement method of the embodiment of the present disclosure, such as image 3 As shown, first place the measured surface horizo...

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Abstract

Provided are a reflective surface shape measuring method and apparatus based on a two-dimensional optical lattice. According to the method, emitting light that undergoes modulation of a spatial lightmodulator and that undergoes lens Fourier transform twice forms an optical lattice on a reflective to-be-measured surface and an optical lattice on a reference plane, the optical lattice on the to-be-measured surface shifts relative to the reference plane after undergoing surface shape modulation of the to-be-measured surface, and the surface shape of the to-be-measured surface is reconstructed onthe basis of the amount of shift and a mode reconstruction algorithm based on Zernike polynomials. The invention further provides the reflective surface shape measuring apparatus and applications ofthe method in shape changes of a measured object. According to the disclosure, measuring processes are simplified and quick measuring is realized.

Description

Technical field [0001] The present disclosure relates to the field of optical measurement, and in particular, to a reflection type surface shape measurement method and device based on a two-dimensional optical lattice. Background technique [0002] Reflective devices are widely used in large-scale scientific facilities, microelectronics, modern defense, medical machinery, scientific instruments, and high-end consumer products. The effect of surface shape accuracy on equipment performance cannot be ignored. Therefore, the precision measurement of reflective devices has attracted much attention. . The advantages of optical measurement methods, such as non-contact, high precision, and high efficiency, make it one of the important techniques for surface measurement. [0003] The optical non-contact measurement method obtains the surface shape information of the measured surface by receiving the optical signal modulated by the object. From the measurement principle, it can be divided i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/25G01B11/00
CPCG01B11/002G01B11/254
Inventor 胡春光凌秋雨查日东李奇峰胡晓东李宏斌胡小唐
Owner TIANJIN UNIV