Biochemical sensor and manufacturing method thereof

Abstract

The invention provides a biochemical sensor and a manufacturing method thereof. The biochemical sensor comprises a substrate, a conductive structure, two electrodes, and sensitive materials, wherein the substrate is provided with a conductive surface and an insulating surface opposite to the conductive surface; the conductive structure is arranged on the conductive surface and comprises multiple parallel-connected nano wire structures arranged in a direction far away from the conductive surface in sequence; the nano wire structures comprise nano wires; any adjacent nano wires are arranged at intervals; the two electrodes are arranged on the surface, far away from the substrate, of the conductive structure and are electrically connected with both ends of each nano wire respectively; the sensitive materials are arranged on the various nano wires; the sensitive materials on the nano wires are arranged in an isolating manner. The biochemical sensor is of a stacked three-dimensional structure comprising the nano wires, and the sensitive materials are arranged on the nano wire structures, so that the contact area of a substance to be detected and the sensitive materials is enlarged, andthen the responsivity and the sensitivity of the sensor are improved.

Description

technical field [0001] The present application relates to the field of sensors, in particular, to a biochemical sensor and a manufacturing method thereof. Background technique [0002] Biological and chemical sensors (biochemical sensors) have extensive and important applications in many fields such as chemical industry, pharmaceuticals, biomedicine, environmental monitoring and food safety, and are closely related to people's production and life. Resistive biochemical sensors are the most widely and deeply researched because of their simple structure, high precision, wide measurement range, long life, and easy miniaturization. [0003] The working principle of the resistive biochemical sensor is to convert the change of the measured physical quantity into the change of the resistance value, and then display or record the change of the measured value through the corresponding measurement circuit. [0004] The responsivity and sensitivity of resistive biochemical sensors are...

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Problems solved by technology

[0005] The main purpose of this application is to provide a biochemical sensor and its manufacturing method to solve the problem of low responsivity and sensitivity of biochemical sensors in the prior art

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