A method for preparing a hydrogen-free metal-doped diamond-like coating and its products

Abstract

The invention discloses a method for preparing a hydrogen-free metal-doped diamond-like coating and its products. The diamond-like coating is mainly deposited by the PACVD technology using high-energy magnetic field filtration and arc-light electron flow to stimulate plasma activation. Using a metal arc target equipped with a gauze baffle with a suspended potential and a graphite target under a high-energy magnetic field to deposit a gradient composite layer to increase the bonding force of the diamond-like coating, and then discharge through the graphite arc target and use a high-energy magnetic field to filter large particles. Carbon particles form a metal-doped diamond-like coating on the surface of the substrate under the ionization of the electrons extracted from the anode and the metal target discharge in the chamber. The diamond-like coating prepared in the process of the invention is doped with metal, which can effectively remove internal stress and has good bonding strength.

Description

technical field [0001] The invention belongs to the field of vacuum coating coating preparation, and specifically refers to a method for preparing a hydrogen-free metal-doped diamond-like coating and a product thereof. Background technique [0002] Diamond-like carbon film (Diamond-like carbon film) has many excellent physical and chemical properties, such as high hardness, low friction coefficient, excellent wear resistance, high dielectric constant, high breakdown voltage, wide band gap, chemical inertness and biocompatibility etc. After years of development, the application of DLC films in many fields has also entered the stage of practical and industrial production. However, in terms of the performance of diamond-like carbon-based films: high internal stress and weak film-base bonding; low toughness, strong brittleness and poor thermal stability; tribological behavior is greatly affected by the environment, these three major problems still restrict its reliability. A c...

AI Technical Summary

Problems solved by technology

[0004] The existing DLC ​​deposition technologies are mainly physical vapor deposition (PVD) and chemical vapor deposition (CVD). PVD mainly includes ion beam deposition (IBD), magnetron sputtering, arc ion plating, pulsed laser deposition, etc. CVD includes hot wire Chemical vapor deposition and plasma chemically enhanced vapor deposition (PECVD) have some problems: ion beam deposition has low sputtering rate and low deposition rate due to graphite sputtering; magnetron sputtering deposition has low sputtering rate on the one hand and low On the one hand, low atomic energy leads to loose structure and low hardness; a large amount of carbon particles will be produced during arc ion plating deposition; pulsed laser deposition has high energy consumption, poor coating uniformity, and small effective deposition area; hot wire vapor deposition technology has high deposition temperature, which greatly The range of matrix materials is limited; although PECVD effectively reduces the reaction temperature, the deposition efficiency is low during the deposition process, the ionization rate of carbon atoms is low, and the film quality structure is not dense enough

[0005] The existing DLC ​​coatings deposited by arc ion plating mostly use metal carbide targets, which use hydrocarbon gas ionization to increase the number of carbon particles, and form carbide-based hydrogen-containing diamond-like coatings on the substrate surface. The internal stress of the diamond coating is high, and the coating is prone to cracks, peeling, wrinkles or even falling off during use; while in the hydrogen-free diamond-like coating deposited by arc ion plating, the particle size of the graphite target is large during the discharge process, and the arc spot It is easy to etch a certain point for a long time, resulting in low utilization rate of the target and a small number of effective carbon particles, which seriously affects the quality of the hydrogen-free diamond-like coating

Images