A non-contact high-precision length measuring system with adjustable scale

Abstract

A non-contact high-precision length measuring system with an adjustable scale relates to the optical precision measurement field. The system comprises an optical measurement projection module, an optical projection identification module and a data acquisition analysis module, wherein the optical measurement projection module is used for forming light and dark interference fringes on the surface ofa measured object and taking as optical measurement rule scales; the optical projection identification module is used for forming a spectrum identification on the surface of the measured object and taking as the identification of the optical measurement rule scales; and the data acquisition analysis module is used for collecting workpieces, the interference fringes of workpiece surfaces and the image information of the spectrum identification and calculating and fitting the size of the measured object according to the image information. In the invention, a laser interference principle is usedto construct a high-precision optical measurement scale scheme which can be used to measure the sizes of the workpieces in almost real-time and accurate mode under the condition that contact with theworkpieces is not needed, and the processing process of the workpieces is not interfered so that production efficiency can be greatly increased.

Description

technical field [0001] The invention relates to the field of optical precision measurement, in particular to a non-contact high-precision length measurement system with adjustable scale. Background technique [0002] During the processing of workpieces such as cutting and grinding, if the operator needs to confirm the size of the current workpiece, he usually uses length measuring tools such as vernier calipers, screw micrometers or micrometers. However, the measurement process based on the above tools will inevitably interrupt the processing of the workpiece, so the measurement of the workpiece size will have a certain impact on the processing progress of the workpiece. In addition, during the measurement process, especially multiple measurements, the error caused by the difficulty in aligning the measurement tool with the workpiece will affect the machining accuracy of the workpiece. [0003] The principle of optical interference in optics has a wide range of applications...

AI Technical Summary

Problems solved by technology

[0004] Although the above interferometric methods have extremely high sensitivity, because they can only provide a single-point coherent signal, they cannot intuitively calibrate the size of the object and use it as a visible high-precision measuring ruler.

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