Optical collimation beam-expanding system

Abstract

The invention provides an optical collimation beam-expanding system so that a problem that the beam caliber and divergence angle of the laser beam can not meet user needs at different transmission distances according to the high NA lithography technology can be solved. The optical collimation beam-expanding system is composed of two spherical mirrors and four cylindrical mirrors; the focal powersof the two cylindrical mirrors are in a y direction and the focal powers of the other two cylindrical mirrors are in an x direction; the single spherical mirror and cylindrical mirrors in different focal power directions form one group of collimation beam-expanding devices. The system has two groups of collimation beam-expanding devices; the first group of collimation beam-expanding devices expandlaser beams and thus laser is transmitted in a range of 5 to 20 meters; and then the second group of collimation beam-expanding devices collimate the laser beams, so that the beam in the x directionand the beam in the y direction can meet the caliber and divergence angle requirements. The optical collimation beam-expanding system has advantages of having a simple structure and being easy to process and adjust; no follower is provided at different transmission distances; and mechanical control is realized easily.

Description

Technical field [0001] The invention relates to an optical collimation beam expansion system, which belongs to the technical field of lithography illumination. Background technique [0002] Since the birth of optical projection exposure technology in 1978, it has experienced several technological development stages such as g-line, i-line, 248nm, and 193nm. In just a few decades since its emergence, the integrated circuits related to the optical projection exposure technology have gone through several development stages such as small-scale, ultra-large-scale, and extremely large-scale, strongly traction by the process of social informatization. Large-scale integrated circuits have become the cornerstone of the development of high-tech fields. From satellites, rockets and other aerospace fields, to radars, laser-guided missiles, and defense fields, as well as people’s daily lives, very large-scale integrated circuits are inseparable. It is the main information processing device an...

AI Technical Summary

Problems solved by technology

The above technology is only applicable to the case where the output laser beam’s aperture in the x direction is equal to the aperture in the y direction, and the divergence angle in the x direction is equal to the divergence angle in the y direction. There is a moving mirror, and the above technology cannot guarantee the final target beam when the laser transmission distance changes. The clear aperture and divergence angle meet the requirements of use

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