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Base plate transfer system

A transmission system and substrate technology, applied in the direction of conveyor objects, furnaces, charge manipulation, etc., can solve the problem of serious friction of the substrate, and achieve the effects of avoiding particles, improving reliability, and extremely friction

Inactive Publication Date: 2018-08-21
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a substrate transfer system to solve the problem of severe friction in the substrate transfer process in the prior art

Method used

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Embodiment 1

[0031] Please refer to figure 2 , which is a schematic structural diagram of a substrate transfer system according to Embodiment 1 of the present invention. Such as figure 2 As shown, in the embodiment of the present application, the substrate conveying system 3 is used to convey a substrate 2, and the substrate conveying system 3 specifically includes: a guide device 30, the guide device 30 is used to support the substrate 2 and the There is a gap between the guide device 30 and the substrate 2; the conveying device 31, the conveying device 31 is used to convey the substrate 2, and the conveying device 31 fixes the substrate 2 by suction and conveys it.

[0032] Specifically, the guide device 30 is capable of ejecting gas, and a gap exists between the guide device 30 and the substrate 2 through the ejected gas. Preferably, the gap (that is, the distance difference between the substrate 2 and the guide device 30 ) is 0.1 mm to 1 mm, for example, the gap is 0.2 mm, 0.3 mm, ...

Embodiment 2

[0044] Please refer to image 3 , which is a schematic structural diagram of a substrate conveying system according to Embodiment 2 of the present invention. Such as image 3 As shown, in the embodiment of the present application, the substrate conveying system 4 is used to convey a substrate 2, and the substrate conveying system 4 specifically includes: a guide device 40, the guide device 40 is used to support the substrate 2 and the There is a gap between the guide device 40 and the substrate 2; the transfer device 41, the transfer device 41 is used to transfer the substrate 2, and the transfer device 41 fixes the substrate 2 by suction and transfers it.

[0045] Specifically, the guide device 40 can eject gas, and a gap exists between the guide device 40 and the substrate 2 through the ejected gas. Preferably, the gap (that is, the distance difference between the substrate 2 and the guide device 40) is 0.1 mm to 1 mm, for example, the gap is 0.2 mm, 0.3 mm, 0.5 mm, 0.65 m...

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Abstract

The invention provides a base plate transfer system. A base plate is supported through a guide device, and is transferred through a transfer device, so that transfer of the base plate can be realized;furthermore, a gap is formed between the guide device and the base plate; in a base plate transfer process, friction between the guide device and the base plate can be greatly reduced and even can beavoided; furthermore, the transfer device fixes the base plate in an adsorption mode, so that friction between the transfer device and the base plate can be avoided, and friction can be extremely small and even can be avoided in the whole base plate transfer process, and therefore, generation of particles in the base plate transfer process is greatly reduced and is even avoided, and reliability of base plate transfer is improved.

Description

technical field [0001] The invention relates to the technical field of display manufacturing equipment, in particular to a substrate conveying system. Background technique [0002] Flat Panel Display (FPD) itself is a flat panel without electron beam tube in CRT (CathodeRay Tube) display, so it can be made very thin, which is an ideal display. The flat panel display includes a plasma display (PDP), a liquid crystal display (LCD), an organic electroluminescent display (OLED), and the like. [0003] In the manufacturing process of the existing flat panel display, it is generally necessary to use a substrate transfer system to transfer the substrate used in the flat panel display to perform conversion between different manufacturing processes, so as to form different functional devices on the substrate. [0004] The existing substrate conveying system generally adopts the roller conveying system, such as figure 1 As shown, the roller transmission system 1 mainly includes a tr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G49/06
CPCB65G49/06
Inventor 吴凡王洪亚
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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