Laser speckle device for measuring out-of-plane and in-plane displacement of objects and measurement method
A technology of out-of-plane displacement and laser speckle, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of uneven heating temperature of objects, limited shape of measured objects, single measurement content, etc., and achieve novel structure and low cost. Low, versatile effect
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[0054] see figure 1 , the laser speckle device for measuring the out-of-plane and in-plane displacement of an object simultaneously measures the out-of-plane displacement of a total reflection mirror and the in-plane displacement of ground glass. The device consists of a He-Ne laser 1 with a wavelength of 632.8nm, a collimator beam expander 2, a first beam splitter 3 (45° mirror), an in-plane displacement sample 10a (frosted glass), an in-plane displacement sample holder 10b and a second Two heating plates 16b, a second temperature control device 16 and a second temperature display device 17, a first focusing lens 11 with a focal length of 100 mm, a color CCD first imaging device 12 and a first display system 13 (computer) together constitute an in-plane displacement Intelligent control and measurement system; 632.8nm He-Ne laser 1, collimator beam expander 2, second beam splitter 4 (45° mirror), total reflection mirror 6 (plane mirror), out-of-plane displacement sample 5a (fu...
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