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Semiconductor structures and their methods of formation and operation

A semiconductor and connection structure technology, applied in the field of semiconductor structures and their formation, can solve the problems of low integration and low integration of semiconductor structures, and achieve the effects of improving performance, increasing area, and increasing sensitivity

Active Publication Date: 2021-01-22
北京诚博锐芯科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in the existing semiconductor structure, the CMOS image sensor and the infrared light detector are separated from each other, resulting in low integration of the semiconductor structure.
[0004] In summary, the existing semiconductor structure has low integration

Method used

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  • Semiconductor structures and their methods of formation and operation
  • Semiconductor structures and their methods of formation and operation
  • Semiconductor structures and their methods of formation and operation

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Embodiment Construction

[0032] There are many problems in the semiconductor structure, for example, the integration degree of the semiconductor structure is low.

[0033] The reasons for the low integration of semiconductor structures are now analyzed: CMOS image sensors are information acquisition devices that detect visible light; infrared light detectors are information acquisition devices that detect infrared light. The CMOS sensor and the infrared light detector are separated in the semiconductor structure and occupy different chip areas respectively, resulting in a larger volume and lower integration of the semiconductor structure.

[0034] In order to solve the above technical problem, the present invention provides a semiconductor structure, comprising: a plurality of photosensitive elements respectively located in the pixel regions of the substrate; a plurality of photoresistors respectively located on the pixel regions of the first surface, the The photoresistor is used to detect the second...

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Abstract

The invention relates to a semiconductor structure and a forming method and a working method thereof, wherein the semiconductor structure comprises: a substrate, wherein the substrate comprises a plurality of discrete pixel regions and the substrate comprises a first surface and a second surface opposite to each other; a plurality of photosensitive elements respectively arranged on the substrate pixel region, wherein the photosensitive elements used for detecting a first light wave; a plurality of photo resistors respectively arranged on the pixel region of the first surface, wherein the photoresistors are used for detecting a second light wave and used for transmitting the first light wave. The wavelength of the second light wave is not equal to that of the first light wave. The photo resistors cover the corresponding photosensitive elements. The photo resistor comprises a first end and a second end which are opposite to each other; a first connection structure connected to the firstend; a second connection structure connected to the second end. The integration degree of the semiconductor structure is high.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a semiconductor structure and its forming method and working method. Background technique [0002] With the continuous improvement of semiconductor technology, CMOS image sensors (Image Sensor) and infrared light detectors, as a basic device for information acquisition, have been more and more widely used in modern society. [0003] CMOS image sensors are capable of detecting visible light; infrared light detectors are capable of detecting infrared light. In the fields of military and field detection, it is often necessary to detect both visible light and infrared light. In order to obtain images of visible light and infrared light, it is often necessary to obtain images of visible light through a CMOS image sensor, and to obtain images of infrared light using an infrared light detector. However, in the existing semiconductor structure, the CMOS image sensor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/146
CPCH01L27/14601H01L27/14605H01L27/14607H01L27/14683
Inventor 罗文哲王林黄金德汪立
Owner 北京诚博锐芯科技有限公司
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