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PECVD graphite boat with anti-oxidation coating pipe and manufacturing method

A technology of anti-oxidation coating and manufacturing method, which is applied in the field of graphite boats, can solve the problems of waste and high cost, and achieve the effects of stable and improved product quality, long service life and avoiding low efficiency

Inactive Publication Date: 2018-08-24
山东伟基炭科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the shortcoming that the above-mentioned prior art exists, the object of the invention is to provide a kind of pipe type PECVD graphite boat with anti-oxidation coating; The oxide film has high strength and wear resistance, and good high temperature resistance. After being used for a certain number of times, it can be maintained after dismantling, pickling, rinsing, and drying. The product quality of the follow-up production does not affect the quality of the coating, and the service life is long, which greatly reduces the use and maintenance costs, improves the production efficiency, and avoids the problems of low efficiency, high cost and serious waste in the existing methods of the prior art. Has good economic and social benefits

Method used

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  • PECVD graphite boat with anti-oxidation coating pipe and manufacturing method

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Effect test

Embodiment 1

[0023] Such as figure 1 As shown, a tubular PECVD graphite boat with an anti-oxidation coating is impregnated with resin in the graphite boat blank. The graphite boat blank is cured, processed, and high-temperature treated to fully carbonize the resin and form a layer Anti-oxidation film2.

[0024] The anti-oxidation film is a uniform film with a thickness of 2-4 μm.

Embodiment 2

[0026] Novel graphite boat of the present invention is specifically realized through the following steps:

[0027] A kind of manufacture method of tube type PECVD graphite boat with anti-oxidation coating, comprises the following steps:

[0028] 1) First place the graphite raw material in a vacuum furnace, perform high-temperature purification at a temperature of 2300 ° C, remove the internal impurities of the graphite raw material, and form a graphite boat blank;

[0029] 2) put the prepared graphite boat blank into the prepared resin and soak for 1.5 hours, so that the resin is completely impregnated into the material interior of the graphite boat blank;

[0030] 3) The impregnated graphite boat blank is heated to a temperature of 100° C. in a graphite oven, and is kept for 2 hours for curing treatment to form a blank;

[0031] 4) Processing the solidified green body into finished products;

[0032] 5) Put the processed finished product into a vacuum furnace for high tempe...

Embodiment 3

[0035] A kind of manufacture method of tube type PECVD graphite boat with anti-oxidation coating, comprises the following steps:

[0036] 1) First place the graphite raw material in a vacuum furnace, and perform high-temperature purification at a temperature of 2350 ° C to remove internal impurities of the graphite raw material to form a graphite boat blank;

[0037] 2) put the prepared graphite boat blank into the prepared resin and soak for 1.7 hours, so that the resin is completely impregnated into the material interior of the graphite boat blank;

[0038] 3) The impregnated graphite boat blank is heated up to 110° C. in a graphite oven, and kept for 2.5 hours for curing treatment to form a green body;

[0039] 4) Processing the solidified green body into finished products;

[0040] 5) Put the finished product into a vacuum furnace for high temperature treatment at 1450°C, keep it warm for 2 hours to fully carbonize the resin, and form a uniform film with a thickness of 3 ...

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Abstract

The invention discloses a PECVD graphite boat with an anti-oxidation coating pipe and a manufacturing method. The method is characterized in that a graphite boat blank is impregnated with resin, the graphite boat blank undergoes the curing treatment, processing and the high-temperature treatment to enable the resin to be fully carbonized, and a layer of thin film is formed on the surface of the graphite boat. The method comprises the following steps that a graphite raw material is placed in a vacuum furnace for high-temperature purification, and the graphite boat blank is formed; the graphiteboat blank is placed into the blended resin for dipping; the graphite boat blank is solidified to form a blank body; the solidified blank body is processed into a finished product; and the processed finished product undergoes the high-temperature treatment, the resin is carbonized, and the thin film is formed on the surface of the finished product. According to the PECVD graphite boat and the method, a layer of uniform anti-oxidation thin film can be formed on the surface of a graphite boat piece, so that the service life is prolonged, the use cost and the maintenance cost are greatly reduced,and good economic and social benefits are achieved.

Description

technical field [0001] The invention relates to the technical field of graphite boats, in particular to a tubular PECVD graphite boat with an anti-oxidation coating and a manufacturing method. Background technique [0002] Tubular PECVD graphite boats are used in the silicon wafer coating process. Ordinary graphite boats need to be disassembled for pickling, rinsing, and drying after being used for about 80 to 100 times. layer of silicon nitride film, so that all parts of the inner wall are in the state of silicon nitride, to ensure that the deposition rate of the inner wall of the graphite boat and the surface of the silicon wafer is consistent, and then put into formal production to ensure the quality of subsequent products. The existing defects and problems are: Complexity, high cost of production and use and maintenance, reduced production efficiency, serious waste of efficiency and efficiency, low economic and social benefits. Contents of the invention [0003] In or...

Claims

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Application Information

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IPC IPC(8): C23C16/458
CPCC23C16/4581
Inventor 姜明理马里奥李为兵苗晓东张江城李文江董凤荣
Owner 山东伟基炭科技有限公司
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