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Smear detection device, laser via processing device, and laser via processing method

A detection device, laser drilling technology, applied to measuring devices, fluorescence/phosphorescence, laser welding equipment, etc., can solve the problem that visual inspection takes a long time

Inactive Publication Date: 2018-08-24
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in laser drilling processing, since thousands to hundreds of thousands of through holes are formed, it takes a long time to visually inspect and desmear treatment also takes a certain amount of time

Method used

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  • Smear detection device, laser via processing device, and laser via processing method
  • Smear detection device, laser via processing device, and laser via processing method
  • Smear detection device, laser via processing device, and laser via processing method

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Embodiment Construction

[0023] figure 1 It is a figure which shows the structure of the laser drilling processing apparatus 1 which concerns on one Embodiment of this invention. The laser drilling processing device 1 is used for laser drilling processing when manufacturing the multilayer substrate 9 , that is, using a laser to form through holes on the multilayer substrate 9 in the manufacturing process. The laser drilling process is a part of the connection process in the manufacture of the multilayer substrate 9 . In the multilayer substrate 9 , for example, wiring layers 91 and insulating layers 92 are alternately laminated on a plate-shaped or thin-plate-shaped base material 90 formed of resin. The wiring layer 91 is a wiring pattern formed of a conductive material such as copper. The insulating layer 92 is formed of a resin such as polyimide, and insulates adjacent wiring layers 91 . In the following description, the multilayer substrate 9 in the process of manufacture is simply referred to a...

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Abstract

An excitation light emission unit (33) of a laser via processing device (1) emits excitation light for generating fluorescent light in a resin forming an insulating layer (92) of a multilayer substrate (9). The excitation light is directed onto a main surface of the multilayer substrate (9) along a path (J1) of laser light for laser via processing, the path (J1) being perpendicular to the main surface and extending from an objective lens (322) to the main surface. An insulating layer detector receives, through the objective lens (322), the fluorescent light generated in the resin constitutingthe insulating layer (92), and thereby detects the presence of the insulating layer (92) in a via hole partway through being formed by laser light. It is thereby possible, in laser via processing, toaccurately detect the presence of a smear in a via hole partway through being formed.

Description

technical field [0001] The invention relates to a stain detection device, a laser drilling processing device and a laser drilling processing method. Background technique [0002] Conventionally, laser drilling has been performed when manufacturing multilayer substrates in which wiring layers and insulating layers are alternately laminated. In the laser drilling process, on the multilayer substrate in the manufacturing process, by irradiating laser light to a part of the uppermost wiring layer, an insulating layer penetrating the wiring layer and the lower side of the wiring layer is formed, and the insulating layer The lower side of the wiring layer is a bottomed via hole (referred to as a hole.). On the inner side of the through hole, copper (Cu) or the like is plated by a subsequent process to ensure electrical connection (conduction state) between the upper and lower wiring layers. [0003] Furthermore, JP-A-2003-149558, JP-A-2007-38202, and JP-A-2008-147321 disclose de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/64G01N21/94B23K26/00B23K26/386H05K3/00H05K3/46
CPCB23K26/00B23K26/389G01N21/17G01N21/55G01N21/64G01N21/88G01N21/956H05K3/00H05K3/46
Inventor 藤原成章
Owner DAINIPPON SCREEN MTG CO LTD
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