An Eddy Current Displacement Sensor for Axial Use of High Temperature Magnetic Suspension Bearing

Abstract

The invention discloses an eddy current displacement sensor for a high temperature magnetic bearing in an axial direction, which belongs to the field of eddy current displacement sensors. The sensor is mainly composed of four parts of a working probe, an auxiliary probe, a signal processing circuit and a temperature compensation circuit, wherein the main probe and the auxiliary probe are mainly composed of a high temperature enameled wire, a ceramic coil skeleton, a high temperature adhesive and a high temperature coaxial cable; the signal processing circuit is mainly composed of an oscillating circuit, a detection circuit and a calibration circuit; the temperature compensation circuit is mainly composed of a temperature drift compensation circuit and a time drift compensation circuit, thetemperature drift compensation circuit is mainly composed of a Pt100 three-wire system temperature acquisition circuit, a signal conditioning circuit and a divider; and the time drift compensation circuit is mainly composed of a Pt100 three-wire system temperature acquisition circuit and two probe differential circuits. Uncompensated signals firstly pass through a subtractor to eliminate bias voltage temperature drift errors of temperature drift and then pass through a division circuit to eliminate sensitivity temperature drift errors, and the sensor is mainly applied to the high temperaturemagnetic bearing in an axial direction.

Description

technical field [0001] The invention belongs to the field of eddy current displacement sensors, and in particular relates to an eddy current displacement sensor for the axial direction of a high-temperature magnetic suspension bearing and an error compensation method for temperature drift error and time drift. Background technique [0002] Eddy current displacement sensor is widely used as a displacement measurement method with non-contact, large measurement range, high resolution and fast response. A common eddy current circuit is mainly composed of two parts: a probe and a signal processing circuit. The probe is mainly composed of enameled wire coil and coil frame, and the temperature signal processing circuit is mainly composed of oscillation circuit, detection circuit and filter circuit. [0003] In a high temperature variable temperature environment, due to the thermal effect of the impedance of the probe coil of the eddy current displacement sensor, after each tempera...

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Problems solved by technology

[0006] Currently in the market, the measurement range of the product is between -30°C and 175°C, and there is no axial displacement measurement sensor molding product suitable for high temperature environments higher than 350°C

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