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Mask components, main mask and mating mask

A mask and component technology, which is applied in electrical components, electrical solid-state devices, semiconductor devices, etc., can solve the problems of easy wrinkling of the mask.

Active Publication Date: 2019-07-23
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, the present invention provides a mask assembly, which solves the problem that the mask plate is easy to wrinkle during the preparation of special-shaped display screens, and improves the yield rate of the evaporation process

Method used

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  • Mask components, main mask and mating mask
  • Mask components, main mask and mating mask
  • Mask components, main mask and mating mask

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Embodiment Construction

[0051] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided for the purpose of making the disclosure of the present invention more thorough and comprehensive.

[0052] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.

[0053] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly un...

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Abstract

The invention relates to a main mask plate, a matching mask plate and a mask assembly. The mask assembly includes a main mask plate with an evaporation area, a matching mask plate with a matching area, and an effective evaporation method for the main mask plate. The plating area corresponds to the display area of ​​the display panel. The first matching opening of the matching mask plate is arranged in the first matching area. The orthographic projection of the first matching opening on the matching mask plate completely covers the effective evaporation opening on the matching mask. Orthographic projection on the board, and the second matching area of ​​the matching mask plate covers the invalid evaporation opening in the invalid evaporation area of ​​the main mask plate. In the above mask assembly, the main mask plate is provided with invalid evaporation openings outside the special-shaped effective evaporation area, which can average the stress on the edge of the effective evaporation area and prevent wrinkles on the edge of the effective evaporation area due to uneven force. Improve evaporation yield. At the same time, the ineffective evaporation opening in the ineffective evaporation area can be blocked by matching the second matching area on the mask plate, so that a special-shaped display panel with a slotted area can be produced.

Description

technical field [0001] The invention relates to the technical field of display preparation, in particular to a mask component, a main mask plate and a matching mask plate. Background technique [0002] Currently, OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) adopts a vacuum evaporation technology to prepare an organic light-emitting layer. In the device preparation process, organic materials are deposited on the substrate above the evaporation source by high-temperature evaporation. In order to make the organic materials evaporate to specific positions according to the design, a high-precision metal mask is required. The mask (ie A pre-designed effective opening area is left on the high-precision metal mask plate, through which the organic material is deposited on the back plate to form a preset pattern. [0003] As slotted special-shaped display screens gradually occupy the mainstream market, the demand for corresponding special-shaped screens is increa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04H01L51/50H01L51/56H10K99/00
CPCC23C14/04H10K50/00C23C14/042H10K71/166C23C14/24B05B12/32B05C21/005B05B12/20H10K71/00H10K71/164
Inventor 韩冰王徐亮张玄甘帅燕高峰
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD