A Laser Wavelength Calibration System Based on Static Michelson Interferometer

Abstract

The invention belongs to the laser measurement field and discloses a laser device wavelength calibration system based on a static Michelson interferometer. The calibration system comprises a laser device module, a polarization interference module and a signal processing module, wherein the laser device module is connected with the polarization interference module and is used for emitting to-be-processed laser, the polarization interference module is connected with the signal processing module and is used for making the to-be-processed laser from the laser device module generate polarization and interference to convert into four paths of interference light with phase difference of 90 DEG, the signal processing module is used for collecting the four paths of interference light with phase difference of 90 DEG and converting the interference light into electric signals, the stripe variation amount of the interference light of the polarization interference module is obtained through calculation, wavelength shift of a laser device in the laser device module is determined according to the stripe variation amount, and error compensation is carried out. The system is advantaged in that thestructure is simple, signal processing difficulty is small, measurement precision is high, and real-time compensation for measurement errors due to wavelength drift of the laser device is realized.

Description

technical field [0001] The invention belongs to the field of laser measurement, and more specifically relates to a laser wavelength calibration system based on a static Michelson interferometer. Background technique [0002] In the laser interferometry system, the laser wavelength is the measurement reference value and is widely used in the field of shape measurement, but the wavelength of lasers such as the most commonly used semiconductor lasers changes with changes in environmental temperature, operating current and other factors, which will affect The accuracy of the laser interferometry system, so real-time compensation of the measurement error caused by the laser wavelength drift is the key to ensure high-precision measurement. [0003] The commonly used method to reduce the laser wavelength drift error is to accurately measure the output wavelength value of the laser before using it. Among laser wavelength measurement methods, laser interferometry is the most commonl...

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Problems solved by technology

[0005] In addition to the complex structure and high cost of the above method, there is another problem: after a precise measurement of the wavelength, the wavelength of the laser will still drift during use, which will still cause measurement errors

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