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Bidirectional-stretchable magnetic film with magnetic anisotropy and preparation method thereof

A magnetic anisotropy and magnetic thin film technology, applied in the direction of magnetic thin film, magnetic film to substrate application, magnetic objects, etc., can solve the problems of limiting the application of magnetic thin film, achieve good application prospects, simple and easy preparation method, The effect of simple structure

Inactive Publication Date: 2018-10-09
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above-mentioned methods for regulating magnetic anisotropy generally use rigid substrates, which severely limit the application of magnetic thin films in flexible devices and wearable devices.

Method used

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  • Bidirectional-stretchable magnetic film with magnetic anisotropy and preparation method thereof
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  • Bidirectional-stretchable magnetic film with magnetic anisotropy and preparation method thereof

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Embodiment 1

[0039] In this embodiment, a biaxially stretchable magnetic film such as figure 1 As shown, it consists of a substrate, a metal buffer layer, a ferromagnetic layer, and a protective layer.

[0040] The substrate is elastic substrate polymer material PDMS, its thickness is 250um, such as figure 2 As shown, the elastic substrate has a tensile strain of 200%.

[0041] The metal buffer layer is a Ta layer with a thickness of 5 nm.

[0042] The ferromagnetic layer is a NiFe layer with a thickness of 30 nm.

[0043] The protective layer was a Ta layer with a thickness of 3 nm.

[0044] The preparation method of above-mentioned magnetic film is as follows:

[0045] (1) Select as image 3 The shown bidirectional stretchable mold includes a circular tray, mutually perpendicular X stretching units and Y stretching units installed on the tray, and the X stretching unit includes a first X pressing sheet, a second X pressing sheet, a second X pressing sheet, One X slide block, the s...

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Abstract

The invention provides a bidirectional-stretchable magnetic film with magnetic anisotropy and a preparation method thereof. The magnetic film comprises a substrate, a metal buffer layer, a ferromagnetic layer and a protective layer; the substrate is an elastic substrate that is stretchable on two-dimensional direction. The method comprises the steps of prestretching a specified volume of the elastic substrate and fixing the elastic substrate, direct-current sputtering and depositing the metal buffer layer, the ferromagnetic layer and the protective layer in sequence on the surface of the elastic substrate by adopting the magnetron sputtering technology, and slowly releasing the elastic substrate along the two-dimensional direction. Compared with the prior technology, the magnetic film provided by the invention is simple in structure and preparation method, and has the magnetic anisotropy and the good application prospect in the industrial application.

Description

technical field [0001] The invention relates to the technical field of magnetic thin films in magnetic sensor devices, in particular to a biaxially stretchable magnetic thin film with magnetic anisotropy and a preparation method thereof. Background technique [0002] With the rapid development of magnetic materials and preparation technology, magnetic devices play an increasingly important role in the fields of information technology and sensing, and their application scope involves magnetic recording heads, magnetic sensors, magnetic microwave devices, etc. For these magnetic devices, the core material is a magnetic thin film. [0003] The magnetic anisotropy of magnetic thin films plays an important role in the operation of magnetic devices. Therefore, in the design and development of magnetic devices, it plays an important role to obtain adjustable magnetic anisotropy of magnetic thin films. In different practical application fields, choosing an appropriate in-plane unia...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01F10/28H01F10/30H01F10/00H01F41/18B82Y30/00
Inventor 周政李润伟詹清峰谢亚丽杨华礼马晓琴
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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