System and method for automatically processing batch products to be detected

Abstract

The invention provides a system and a method for automatically processing a batch product to be detected,which comprises the following steps: calculating the number T of the batch products to be detected and the number M of the batch products which can be detected by the machine,calculating the difference L between the two numbers,returning to the first step if the difference value is less than orequal to 0; judging the quantity W of the batch product to be detected if the difference value is greater than 0,calculating the difference value C between the value T and the value W,comparing the value L and the value C,and if L is greater than or equal to C,the detection of the batch product in the quantity of C is cancelled; the detection of the batch products in the quantity of L is cancelled if L is less than C; wherein the batch product with detection cancelled is the batch product left over from the batch product to be detected deducting the batch product which must be detected. The above method can specify whether all of the batch product are waiting for detection or just those remaining from partial batch product detection cancellation,and can determine the quantity and batch number of the cancelled batches,which reduces the human error,moreover,the cost is reduced by reasonably utilizing the equipment resources.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a system and method for automatically processing batches of products to be tested. Background technique [0002] In the semiconductor manufacturing process, every time a process is completed, a certain number of batches of products (Lot, a batch of wafer products) need to be randomly or fixedly selected for inspection to determine whether there are defects or structures formed by the process Does the size meet the requirements. [0003] However, when the volume of stock at the measurement site reaches a certain level, it will directly affect the cycle time of inline production (inline), thereby directly affecting the efficiency. Now when there is a stockpiling phenomenon, it is necessary to manually cancel part of the Lot detection (skip Lot) to ensure the reasonable utilization rate of the machine and the work efficiency of the inline. [0004] Whether the Lot can cance...

AI Technical Summary

Problems solved by technology

Therefore, manually canceling the detection of Lot (manual skip Lot) will cause a lot of burden on the engineer (loading)

In addition, relying on experience to judge whether to skip lot, there will be human error, which greatly affects the normal work of inline

Moreover, once an error occurs, it will directly lead to the failure to detect the defect, so that it cannot be fed back to the production line in time, and in severe cases, it will affect the yield of large-volume wafers

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