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Sensor for scanning probe microscope

A scanning probe and sensor technology, applied in the field of scanning probe microscopy, to achieve the effect of simple structure, high sensitivity and resolution

Active Publication Date: 2018-10-23
SANMING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a sensor applied to a scanning probe microscope to solve the existing problems of sensors using a micro-cantilever structure

Method used

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  • Sensor for scanning probe microscope
  • Sensor for scanning probe microscope

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Embodiment Construction

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is some embodiments of the present invention, but not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0021] combine figure 1 with figure 2 , in one embodiment, the present invention is applied to the sensor of the scanning probe microscope, comprises: base 1, the insulating bearing layer 2 that is positioned at the upper side of base 1, the first quartz crystal oscillator 3 that is positioned on the insulating bearing ...

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Abstract

The invention provides a sensor for a scanning probe microscope, and the sensor comprises a pedestal, an insulating bearing layer located at the upper side, a first quartz crystal oscillator located on the insulating bearing layer, a second quartz crystal oscillator, and a probe. The base part of the second quartz crystal oscillator is configured on a first fork pin of the first quartz crystal oscillator, and the probe is configured to be on a first fork pin of the second quartz crystal oscillator. The extending directions of the fork pins of the first and second quartz crystal oscillators arethe same, and the resonant frequencies of the first and second quartz crystal oscillators are different. The sensor provided by the invention is simple in structure. Moreover, the sensor has a multi-frequency in-situ excitation / detection function, so the sensor has the higher sensitivity and resolution.

Description

technical field [0001] The invention relates to a scanning probe microscope technology, in particular to a sensor applied to a scanning probe microscope. Background technique [0002] Scanning probe microscope is a general term for all microscopes that mechanically scan and move the probe on the sample to detect the image of the sample, mainly including atomic force microscope, laser force microscope, magnetic force microscope, etc. Scanning probe microscopes currently used in scientific research and commercial production mostly use micro-cantilever needle-tip integrated sensors. When detecting a sample, the probe tip of the micro-cantilever microsensor is close to the surface of the sample to be tested, the atoms at the tip interact with the atoms on the sample surface, and the force is transmitted to the micro-cantilever connected to the probe, and the micro-cantilever deforms or When the motion state changes, the change information of the microcantilever with the fluctua...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q30/00
CPCG01Q30/00
Inventor 彭平兰永强
Owner SANMING UNIV