Three-dimensional micro-heater and preparation method thereof

Abstract

The invention provides a three-dimensional micro-heater and a preparation method thereof. The preparation method includes the following steps: providing a semiconductor substrate, and forming a sacrificial layer with a platform corrosion window; etching the semiconductor substrate to form a plurality of sinking platform structures; forming a dielectric thin film defined with a heating film region,a supporting beam region and an electrode region, wherein the heating film region is connected to the electrode region through the supporting beam region; preparing heating resistance wires, a connecting lead, an electrode and an electrode lead; forming a thin film release window on the dielectric thin film; and etching the semiconductor substrate to form a heat insulating cavity, and further releasing the heating film region and the supporting beam region. According to the above scheme, the three-dimensional heater provided by the invention is provided with a groove-shaped sinking platform structured heating film region array, the heating resistance wires are arranged inside the sinking platform array, the heating film region is stable in structure and low in power consumption, the heating resistance wires are uniform in heating distribution, and a large gas contact area and a high gas circulation speed can be realized; and the heating resistance wires with different shapes and layouts are arranged on different sinking platform structures, and thus the heat adjustment of the heating film region can be achieved.

Description

technical field [0001] The invention belongs to the field of micromechanical systems (MEMS), in particular to a three-dimensional micro heater and a preparation method thereof. Background technique [0002] With the continuous development of micro-machining technology, micro-heaters based on MEMS technology have begun to be widely used in the fields of gas detection, environmental monitoring and infrared light sources. With the continuous promotion and deepening of applications, the low power consumption of micro-heaters , low cost, high performance, high reliability requirements are increasingly strong. How to make a heater with low power consumption and high performance has always been the goal pursued by those skilled in the art. [0003] At present, micro-heaters based on silicon substrates can be divided into two types based on the structure of the central heating membrane area, namely closed membrane type and suspended membrane type. The boundary of the supporting fi...

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Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a three-dimensional micro heater and its preparation method, which is used to solve the problem of difficulty in the uniform deposition of sensitive materials in the three-dimensional heating film area in the prior art, less gas circulation and heating Problems such as limited heat distribution in the membrane area

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