Absolute pressure fiber fabry-perot silicon carbide heat-resistant aviation pressure sensor
A Faper silicon carbide and pressure sensor technology, which is used in the manufacture of aviation pressure sensors and the field of absolute pressure fiber Faber silicon carbide high temperature pressure sensors, which can solve the problems of inability to realize dynamic monitoring of pressure changes, high working temperature, and achieve temperature drift. The effect of low characteristic, fast response speed and high measurement accuracy
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[0104] The full SiC structure sensing head designed by the present invention is applied to the measurement of dynamic pressure and flow field characteristics in the high-temperature area of the aero-engine. In order to be installed with the devices in the high-temperature area of the aero-engine, a molybdenum package seat 5 and a molybdenum package body are specially designed. 6. The SiC sensing diaphragm 1 and SiC substrate 2 are installed under the zirconia base 3, one end of the sapphire optical fiber 4 is bonded to the SiC substrate 2, and the zirconia base 3 is installed in the countersunk cavity 5C of the molybdenum package base 5 Among them, a molybdenum package body 6 is threadedly connected to the bottom of the molybdenum package base 5;
[0105] According to the sensor obtained in Example 1, the pressure measurement is carried out in a high-temperature environment. The ambient temperature is 1000 ° C, the measurement range is 0-1 MPa, and the Fappon cavity length...
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