Thin film consisting of micron-sized pentagonal stannous oxide and preparation method thereof
A stannous oxide, pentagon technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, to achieve the effect of simple raw materials, simple operation and simple equipment
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Embodiment 1
[0021] A method for preparing a thin film material composed of micron-sized pentagonal stannous oxide, the method is specifically as follows: 0.1g of commercial stannous oxide is placed in a corundum boat, and then the polished surface of the cleaned silicon wafer is placed in a distance The commercial stannous oxide is 0.5cm in the vertical direction and 1cm obliquely above the horizontal direction, and it is placed in the CVD tube furnace so that the commercial stannous oxide is in the upstream position of the gas flow direction, and the silicon wafer is in the downstream position. Use a mechanical pump to evacuate to 10 -2 Pa, flow argon gas at a flow rate of 50sccm, then raise the temperature of the instrument to 780°C at a rate of 19.5°C / min, react at a constant temperature for 30min, and then naturally cool to room temperature to prepare a micron-sized pentagonal stannous oxide thin film material.
Embodiment 2
[0023] A method for preparing a thin film material composed of micron-sized pentagonal stannous oxide, the method is specifically as follows: 0.1g of commercial stannous oxide is placed in a corundum boat, and then the polished surface of the cleaned silicon wafer is placed in a distance The commercial stannous oxide is 0.5cm in the vertical direction and 2cm in the horizontal direction obliquely above, and it is placed in the CVD tube furnace so that the commercial stannous oxide is in the upstream position of the gas flow. Use a mechanical pump to evacuate to 10 -2 Pa, flow argon gas at a flow rate of 50 sccm, then raise the temperature of the instrument to 800°C at a rate of 19.5°C / min, react at a constant temperature for 30 minutes, and then naturally cool to room temperature to prepare a thin film material composed of micron-sized pentagonal stannous oxide.
[0024] image 3 It is the AFM image of the stannous oxide thin film. It can be seen from the figure that the thin...
Embodiment 3
[0027] A method for preparing a thin film material composed of micron-sized pentagonal stannous oxide, the method is specifically as follows: 0.1g of commercial stannous oxide is placed in a corundum boat, and then the polished surface of the cleaned silicon wafer is placed in a distance The commercial stannous oxide is 0.5cm in the vertical direction and 2cm in the horizontal direction obliquely above, and it is placed in the CVD tube furnace so that the commercial stannous oxide is in the upstream position of the gas flow. Use a mechanical pump to evacuate to 10 -2 Pa, flow argon gas at a flow rate of 50 sccm, then raise the temperature of the instrument to 820°C at a rate of 19.5°C / min, react at a constant temperature for 30 minutes, and then naturally cool to room temperature to prepare a thin film material composed of micron-sized pentagonal stannous oxide.
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