Curing substrate pretreatment compositions in nanoimprint lithography
A technology of nanoimprinting and pretreatment, which is applied in nanotechnology, nanotechnology, nanotechnology for information processing, etc., and can solve problems such as pollution
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[0171] In the following examples, the reported interface energy at the interface between the imprint resist and air was measured by the maximum bubble pressure method. The measurement was carried out using a BP2 bubble pressure tensiometer manufactured by Krüss GmbH, Hamburg, Germany. In the maximum bubble pressure method, the maximum internal pressure of a bubble formed in a liquid by means of a capillary is measured. Using a capillary of known diameter, the surface tension can be calculated from the Young-Laplace formula. For some pretreatment compositions, the values reported by the manufacturer for the interfacial energy at the interface between the pretreatment composition and air are provided.
[0172] Viscosity Viscosity was measured using a Brookfield DV-II+Pro with a small sample adapter using a temperature controlled bath set at 23°C. The reported viscosity values are the average of five measurements.
[0173] An adhesive layer was prepared on a substrate by c...
Embodiment 1
[0180] In Example 1, droplets of imprint resist were deployed on a substrate with a coating of pretreatment composition A (Sartomer 492 or "SR492"). SR492, available from Sartomer, Inc. (Pennsylvania, USA), is propoxylated (3) trimethylolpropane triacrylate (multifunctional acrylate). Figure 14 An image of a droplet 1400 of imprint resist on a pretreatment coating 1402 and the resulting composite coating 1404 is shown 1.7 seconds after initiation of dispensing in discrete portions in a staggered grid pattern. In this example, the droplet retains its spherical cap-like shape, and the spreading of the imprint resist is restricted. Such as Figure 14 As can be seen in Comparative Example 1, when the droplet 1400 spreads beyond the imprint resist on the adhesive layer in Comparative Example 1, the droplet is kept separated by the pretreatment coating 1402, which forms a boundary 1406 around the droplet. Certain components of the imprint resist spread out beyond the center of th...
Embodiment 2
[0181] In Example 2, droplets of imprint resist were deployed on a substrate with a coating of pretreatment composition B (Sartomer 351HP or "SR351HP"). SR351HP, available from Sartomer, Inc. (Pennsylvania, USA), is trimethylolpropane triacrylate (multifunctional acrylate). Figure 15 An image of a drop 1500 of imprint resist on a pretreatment coating 1502 and the resulting composite coating 1504 is shown 1.7 seconds after initiation of drop dispensing in a square grid pattern. After 1.7 seconds, the droplet 1500 covers most of the surface area of the substrate and is separated by the pretreatment coating 1502, which forms a border 1506 around the droplet. Droplet 1500 is more uniform than droplet 1400 in Example 1, so a significant improvement in spreading over Example 1 is observed. The greater degree of spreading is at least partially attributable to the surface tension difference between Pretreatment Composition B and the imprint resist being greater than the surface te...
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