Ultrasonic auxiliary silicon carbide wafer grinding and polishing device
An ultrasonic-assisted silicon carbide technology, applied in the field of processing equipment, ultrasonic-assisted grinding and polishing of silicon carbide wafers, can solve the problems of large surface damage and low material removal rate of silicon carbide wafer grinding and polishing, and improve processing efficiency and quality , economic precision is not high, the effect of improving efficiency
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[0045] The present invention is described in detail below in conjunction with accompanying drawing:
[0046] Referring to Fig. 1, the power part of described conventional grinding and polishing device comprises counterweight A-1, No. 1 retaining ring A-3, No. 1 grinding disc or polishing pad A-4; No. 1 test piece A-2 is placed on Between counterweight A-1 and No. 1 grinding disc or polishing pad A-4, counterweight A-1, No. 1 specimen A-2 and No. 1 grinding disc or polishing pad A-4 are stacked from top to bottom Placed and connected with each other, the counterweight A-1 provides the polishing pressure for the No. 1 specimen A-2, and the friction of the No. 1 specimen A-2 on the No. 1 grinding disc or polishing pad A-4 Rotate down (rotating speed is ω), the clearance fit between No. 1 retaining ring A-3 and counterweight A-1 is limited to limit the horizontal movement of No. 1 specimen A-2 (rotating speed is v s ) without impeding rotation.
[0047] A kind of ultrasonic assi...
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