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Vacuum deposition method of organic molecules

A technology of vacuum deposition and organic molecules, applied to the surface coating liquid device, spray discharge device, liquid spraying equipment, etc., can solve the problems of low ion transmittance, low mass flow output of electrospray, etc., to increase the transmittance , increase the mass flow output, change the effect of the spray shape

Active Publication Date: 2018-11-30
JINHUA VOCATIONAL TECH COLLEGE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Defect 1 of the prior art: using a gas splitter to separate different vacuum sections in the vacuum chamber, the disadvantage is that the transmittance of ions is low; Defect 2 of the prior art: the mass flow output of the electrospray is low

Method used

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  • Vacuum deposition method of organic molecules
  • Vacuum deposition method of organic molecules
  • Vacuum deposition method of organic molecules

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Embodiment Construction

[0022] Such as figure 1 It is a schematic diagram of the present invention, and the vacuum deposition device of organic molecules mainly includes an electrospray device (1), a displacement stage (2), a capillary (3), a vacuum cavity (4), an ion buncher I (5), an ion buncher Device II (6), electrostatic deflector (7), quadrupole mass filter (8) and sample stage (9), xyz is the three-dimensional coordinate system, and the electrospray device (1) is installed on the displacement stage (2) to be capable of three-dimensional Move, the vacuum chamber (4) is formed by connecting two sections of cylindrical vacuum chambers at 90 degrees, and has an initial end and an end. The ion beamer I (5), ion beamer II (6) , electrostatic deflector (7), quadrupole mass filter (8), and sample stage (9) are all located in the vacuum chamber (4) in sequence, the electrostatic deflector (7) is located at the corner of the vacuum chamber, and the quadrupole mass filter Device (8) has pole plate, has ...

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Abstract

The invention relates to the field of material preparation, and discloses a vacuum deposition method of organic molecules. The vacuum deposition method of organic molecules comprises the steps that high-purity nitrogen is fed through a gas inlet while the flow pattern is 5.0 SLM, and a solution is fed through a liquid inlet while the flow pattern is 20 mL / M; voltage is applied between an outer pipe and an inner pipe to turn part of molecules, to be deposited, in the solution into ions so as to make the solution form atomized liquid drops, the voltage is regulated, and rotation of a baffle is regulated to change the relative position of the baffle to a groove so as to control jet beams; the position of an electrospray device is adjusted, and the number of the atomized liquid drops enteringthe vacuum chamber through capillary tubes is adjusted; ion packages and impurities of molecules to be deposited in liquid drops pass through a first ion beam buncher; ion packages and impurities of molecules to be deposited pass through a second ion beam buncher to enable ion beams further gather; the ion packages and the impurities arrive at an electrostatic deflector; and after charge-to-mass ratio selection, charged impurities are deflected and collide with a pole plate of a quadrupole mass filter to be filtered out, and finally, only the ion packages of the molecules to be deposited arrive at the surface of a substrate.

Description

technical field [0001] The invention relates to the field of material preparation, in particular to a vacuum deposition method of organic molecules with a special spraying method. Background technique [0002] The electrospray deposition method is a method for depositing molecules with large molecular weight and easy to decompose. The solution containing the molecules to be deposited is atomized by the electrospray device, and the molecules are charged and enter the vacuum system in the form of ions. In the electric field or Under the action of the pressure difference of different vacuum sections, it moves and finally deposits on the substrate. Defect 1 of the prior art: gas splitters are used to separate different vacuum sections in the vacuum chamber, and the disadvantage is that the transmittance of ions is low; Defect 2 of the prior art: the mass flow output of the electrospray is low. For some applications, some special technical requirements should also be considered,...

Claims

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Application Information

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IPC IPC(8): B05B5/08B05B5/03B05D1/00
CPCB05B5/03B05B5/08B05B5/087B05D1/62Y02E10/549
Inventor 傅晶晶张向平
Owner JINHUA VOCATIONAL TECH COLLEGE
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