Vacuum deposition method of organic molecules

Abstract

The invention relates to the field of material preparation, and discloses a vacuum deposition method of organic molecules. The vacuum deposition method of organic molecules comprises the steps that high-purity nitrogen is fed through a gas inlet while the flow pattern is 5.0 SLM, and a solution is fed through a liquid inlet while the flow pattern is 20 mL/M; voltage is applied between an outer pipe and an inner pipe to turn part of molecules, to be deposited, in the solution into ions so as to make the solution form atomized liquid drops, the voltage is regulated, and rotation of a baffle is regulated to change the relative position of the baffle to a groove so as to control jet beams; the position of an electrospray device is adjusted, and the number of the atomized liquid drops enteringthe vacuum chamber through capillary tubes is adjusted; ion packages and impurities of molecules to be deposited in liquid drops pass through a first ion beam buncher; ion packages and impurities of molecules to be deposited pass through a second ion beam buncher to enable ion beams further gather; the ion packages and the impurities arrive at an electrostatic deflector; and after charge-to-mass ratio selection, charged impurities are deflected and collide with a pole plate of a quadrupole mass filter to be filtered out, and finally, only the ion packages of the molecules to be deposited arrive at the surface of a substrate.

Description

technical field [0001] The invention relates to the field of material preparation, in particular to a vacuum deposition method of organic molecules with a special spraying method. Background technique [0002] The electrospray deposition method is a method for depositing molecules with large molecular weight and easy to decompose. The solution containing the molecules to be deposited is atomized by the electrospray device, and the molecules are charged and enter the vacuum system in the form of ions. In the electric field or Under the action of the pressure difference of different vacuum sections, it moves and finally deposits on the substrate. Defect 1 of the prior art: gas splitters are used to separate different vacuum sections in the vacuum chamber, and the disadvantage is that the transmittance of ions is low; Defect 2 of the prior art: the mass flow output of the electrospray is low. For some applications, some special technical requirements should also be considered,...

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Problems solved by technology

Defect 1 of the prior art: using a gas splitter to separate different vacuum sections in the vacuum chamber, the disad...

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