Tracking type displacement sensor and measurement method thereof

Abstract

The invention provides a tracking type displacement sensor and a measurement method thereof. The tracking type displacement sensor comprises a first reflector, a first driver and a processing system;the first reflector is used for receiving a laser beam of a first laser beam reflected by the first reflecting surface of a triangular wave reflector; furthermore, the laser beam is reflected to the second reflecting surface of the triangular wave reflector along the same path in a measurement process; the first driver is used for driving a first photoelectric detector to move, so that a position,where the laser beam reflected by the second reflecting surface is incident to the first photoelectric detector, is kept same in a measurement process that the first laser beam is incident to the same first reflecting surface; and the processing system is used for calculating the displacement change value of a measured object according to the movement distance of the first photoelectric detectorin the movement direction provided by the first driver, the included angle between the movement direction of the first photoelectric detector provided by the first driver and the laser beam incident to the first photoelectric detector, and the acute included angle between the movement direction provided by the first driver and the movement direction of the measured object. By means of the trackingtype displacement sensor and the measurement method thereof provided by the invention, the measurement precision of the displacement sensor can be increased.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a tracking displacement sensor and a measurement method thereof. Background technique [0002] The new principle of displacement measurement based on the optical triangular magnification method is realized on the basis of the optical triangular magnification method, combined with triangular wave optical devices and high-precision PSD (Position Seitive Device, also known as position sensitive detector). The triangular wave optical device subdivides the linear displacement into equal intervals, reduces the processing accuracy and size requirements of optical devices, and at the same time reduces the size requirements of high-precision PSD, and realizes high-precision displacement measurement in a small range. The principle and structure of the displacement measurement based on the optical triangular magnification method are shown in Fig. 1. figure 1 It can be seen that after ...

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Problems solved by technology

At the same time, the larger the incident angle of the laser beam on the PSD, the larger the spot, and the larger the spot, the lower the measurement accuracy of the PSD, and the length of the PSD is also increased.

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