Two-dimensional parallel flexible micro-motion platform based on piezoelectric driving

Abstract

The invention discloses a two-dimensional parallel flexible micro-motion platform based on piezoelectric driving. The two-dimensional parallel flexible micro-motion platform comprises a fixed frame and a worktable which is arranged in the middle of the fixed frame. T-shaped displacement decoupling flexible mechanisms with the same structure are arranged around the worktable, every two adjacent T-shaped displacement decoupling flexible mechanisms are perpendicular to each other, wherein the outer sides of two adjacent T-shaped displacement decoupling flexible mechanisms are provided with symmetric displacement amplifying flexible mechanisms with the same structure, inner sides of two sides on the fixed frame close to the symmetric displacement amplifying flexible mechanisms are provided with grooves, piezoelectric stack drivers are arranged in the grooves, and displacement driving ends of the piezoelectric stack driver are in contact with the symmetric displacement amplifying flexible mechanisms. According to the micro-motion platform, the cross-coupling displacement in X and Y axial directions can be eliminated, the positioning precision is high, the stroke reaches 100 micrometersor more, the requirements of nanometer-level precision can be satisfied, and the micro-motion platform has the advantages of compact structure, strong anti-interference ability and low processing cost.

Description

technical field [0001] The invention relates to a piezoelectric-driven two-dimensional parallel flexible micro-motion platform, which belongs to the technical field of micro-nano manipulation and nano-precision positioning. Background technique [0002] With the rise and rapid development of micro-nano technology, there is an urgent need for high-precision, high-resolution, high-reliability nano-micro level precision positioning system. At present, micro-nano precision positioning is usually realized by combining piezoelectric ceramic drive and flexible mechanism transmission. The flexible hinge micro-displacement mechanism has the advantages of compact structure, small size, no mechanical friction, no gap, no crawling, high mechanical resonance rate, and strong anti-vibration interference ability. It is easy to achieve high-resolution displacement by using piezoelectric ceramic drivers. However, flexible two-dimensional micro-motion platforms based on piezoelectric drives...

AI Technical Summary

Problems solved by technology

However, the structure of the micro-motion stage is asymmetrical, and the axial coupling error cannot be eliminated to the greatest extent, and the displacement amplification factor of the displacement amplification mechanism in the micro-motion stage is small, which limits the range of motion of the micro-motion stage

Chinese Patent Publication No. CN 103225710 A, a patent titled "A Two-Dimensional Parallel Micro-motion Platform Driven by Piezoelectric Ceramics", discloses a two-dimensional parallel micro-motion platform, which uses a two-stage displacement amplification mechanism, a composite parallel quad The rod guide mechanism and the L-shaped decoupling mechanism realize the precise positioning of the micro-motion stage in the XY two axes, but the amplification mechanism in the micro-motion stage is reverse transmission, resulting in complex structure, large overall size, and high processing costs

Its shortcomings are that there is no displacement amplification mechanism, its stroke is small, the overall size of the platform is large, the resonance frequency is small, and the anti-interference ability is weak

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