Positive pressure leak hole calibration system and method with lower limit of 10<-10>Pam<3>/s
A calibration system and positive pressure leak technology, which is applied in the testing of machine/structural components, fluid tightness testing, and detection of fluid appearance at the leak point, etc., can solve the problems that cannot meet the calibration requirements of positive pressure leaks, etc. , to achieve the effect of solving calibration technical problems and technical bottlenecks
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[0040] (1) Keep the ambient temperature at 23±1°C, use high-purity N 2 Gas (both with a purity of 99.999%) washes the vacuum system 3 times; after that, through the valve V 5 Charge 101.32kPa of N to the Leak outlet of the calibrated leak 2 Gas (99.999% pure) is used to simulate the ground atmospheric pressure state at the leak outlet.
[0041] (2) Set the temperature of the incubator to 23±0.05°C, close the valve V 7 The gas leaked from the leak hole is accumulated in the accumulation chamber (Leak and V 7 Between the metal seal structure, the volume is V s =0.98mL), after accumulating the leaked gas for 36000s, the accumulative indoor gas pressure is 218Pa(P s =218Pa), open the valve V 7 Expand the mixed gas in the accumulation chamber to VC 1 Decaying pressure in the volume composed of its related pipes, after waiting for 100s, close the valve V 9 , open the valve V 8 , the mixed gas is introduced into the mass spectrometry chamber VC through the molecular flow samp...
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