Positive pressure leak hole calibration system and method with lower limit of 10<-10>Pam<3>/s
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A calibration system and positive pressure leak technology, which is applied in the testing of machine/structural components, fluid tightness testing, and detection of fluid appearance at the leak point, etc., can solve the problems that cannot meet the calibration requirements of positive pressure leaks, etc. , to achieve the effect of solving calibration technical problems and technical bottlenecks
Inactive Publication Date: 2018-12-11
BEIJING DONGFANG MEASUREMENT & TEST INST
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The lower calibration limits of the four devices mentioned above are all higher than 1×10 -8 Pam 3 / s, cannot meet the small leak rate (leakage rate is less than 1×10 -8 Pam 3 / s) Calibration requirements for positive pressure leaks
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Embodiment 1
[0040] (1) Keep the ambient temperature at 23±1°C, use high-purity N 2 Gas (both with a purity of 99.999%) washes the vacuum system 3 times; after that, through the valve V 5 Charge 101.32kPa of N to the Leak outlet of the calibrated leak 2 Gas (99.999% pure) is used to simulate the ground atmospheric pressure state at the leak outlet.
[0041] (2) Set the temperature of the incubator to 23±0.05°C, close the valve V 7 The gas leaked from the leak hole is accumulated in the accumulation chamber (Leak and V 7 Between the metal seal structure, the volume is V s =0.98mL), after accumulating the leaked gas for 36000s, the accumulative indoor gas pressure is 218Pa(P s =218Pa), open the valve V 7 Expand the mixed gas in the accumulation chamber to VC 1 Decaying pressure in the volume composed of its related pipes, after waiting for 100s, close the valve V 9 , open the valve V 8 , the mixed gas is introduced into the mass spectrometry chamber VC through the molecular flow samp...
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Abstract
The invention relates to a positive pressure leak hole calibration system and method with a lower limit of 10<-10>Pam<3> / s. The system comprises a molecular pump pumping system, a high-purity helium cylinder, a high-purity nitrogen cylinder, a gas sampling valve (V4), ten vacuum valves (V1, V2, V3, V5, V6, V7, V8, V9, V10, V11), three vacuum chambers (VC1, VC2, VC3), three vacuum gauges (G1, G2, G3), a quadrupole mass spectrometer (G4), a molecule flow sample inlet element (C), a getter pump (NEG), a calibrated positive pressure leak hole and a constant temperature cabinet.
Description
technical field [0001] The invention belongs to the technical field of vacuum measurement, specifically a kind of vacuum measurement with a lower limit of 10 -10 Pam 3 / s positive pressure leak calibration system and method. Background technique [0002] Positive pressure leak inlets are devices that provide a steady flow of gas to atmosphere. Positive pressure leaks with a leak rate of less than 10-8Pam3 / s are widely used in leak detection and calibration of high-reliability and long-life electronic components. In order to ensure that the leak rate of vacuum electronic devices to the atmosphere meets product quality requirements, it is necessary to The positive pressure leak of the reference leak rate is regularly calibrated to ensure the correctness of the calibrated leak rate of vacuum electronic devices. The document "Two dynamic comparison methods for calibrating the rate of pressure leaks", "Vacuum", Volume 53, No. 1-2, Page 187-191, 1999, proposed a positive pressu...
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