A method and device for reducing laser focus spot size

A technology for focusing spot and size, applied in the direction of optics, optical components, instruments, etc., can solve the problems of limited effect, long longitudinal length of spot, unsuitable processing of bulk materials, etc., and achieve the effect of reducing size and horizontal degree

Active Publication Date: 2020-07-28
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

When radially polarized light is focused with a high numerical aperture (NA) objective lens, a strong longitudinally polarized light field component can be obtained near the focal point. This method can reduce the lateral size of the focused spot. However, using the radial The longitudinal length of the spot obtained by focusing the polarized beam is long, which is not suitable for the processing of bulk materials
The above two methods can reduce the size of the laser focus spot to a certain extent, but the effect is very limited, and cannot well meet the precision requirements of laser processing

Method used

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  • A method and device for reducing laser focus spot size
  • A method and device for reducing laser focus spot size

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Embodiment Construction

[0025] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0026] The device for reducing laser focus spot provided by the present invention, such as figure 1 As shown, along the optical path direction of the incident laser beam, it includes: a light splitting unit, a first lens, a radial polarization unit and a second lens;

[0027] The spectroscopic unit is used to perform spectroscopic operation on the incident laser beam, so that the incident laser...

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Abstract

The invention discloses a method and device for reducing the size of a laser focused spot. The method comprises the steps: performing the splitting operation of an incident laser beam to achieve the spatial dispersion of the incident laser beam to form dispersive light beams having a concentric circular structure, wherein the light, having different wavelengths, of the dispersive light beams are distributed on circular rings with the different radiuses; converting the dispersive light beams into parallel annular beams; converting the annular beams into radially polarized beams; and performingthe focusing of the radially polarized beams to obtain a focused spot for laser processing. The device includes a beam splitting unit, a first lens, a radial polarization unit, and a second lens. Themethod and device can effectively reduce the size of the laser focused spot from two dimensions of the lateral direction and the longitudinal direction, thereby effectively improving the precision ofthe laser processing.

Description

technical field [0001] The invention belongs to the field of laser material processing, and more specifically relates to a method and device for reducing the size of a laser focus spot. Background technique [0002] In recent years, the use of femtosecond lasers for three-dimensional processing in transparent materials has developed into an important branch in the field of laser material processing technology. This method can not only process various optical devices, such as optical waveguides, polarized optical elements, etc., but also can be used to manufacture microfluidic systems and optofluidic systems, etc. The interaction between the laser and the transparent material is related to the nonlinear absorption characteristics of the material to the photon. The area where the laser acts on the material is related to the light intensity distribution at the focal point. The smaller the laser focus spot size, the higher the processing accuracy. Therefore, in order to improve...

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): G02B27/16G02B27/10G02B27/09G02B27/48
CPCG02B27/0944G02B27/1006G02B27/16G02B27/48
Inventor张静宇高骥超刘思垣
OwnerHUAZHONG UNIV OF SCI & TECH