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A kind of array substrate and preparation method thereof

An array substrate and substrate technology, which is applied in the field of array substrate and its preparation, can solve the problems of long production cycle and achieve the effects of reducing production cycle and cost, saving photomask process, and reducing photo-induced leakage current

Active Publication Date: 2021-01-29
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology

[0002] Compared with traditional A-Si (Amorphous Silicon Thin Film Transistor) technology, LTPS (Low Temperature Poly-silicon) technology has higher carrier mobility and is widely used in small and medium-sized high-resolution TFT LCDs ( Thin Film Transistor liquid crystal display, Thin Film Transistor liquid crystal display) and AMOLED (active matrix organic light emitting diode, Active-matrix organic light emitting diode) panel production, but the number of photomasks required for the corresponding TFT array substrate production is more More, longer product production cycle

Method used

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  • A kind of array substrate and preparation method thereof
  • A kind of array substrate and preparation method thereof
  • A kind of array substrate and preparation method thereof

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Embodiment Construction

[0043] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. The directional terms mentioned in the present invention, such as [top], [bottom], [front], [back], [left], [right], [inside], [outside], [side], etc., are only for reference The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention. In the figures, structurally similar elements are denoted by the same reference numerals.

[0044] Such as figure 1 Shown is a method for preparing an array substrate provided in Embodiment 1 of the present invention, which includes the following steps:

[0045]Step S1, providing a substrate, and covering the buffer layer on the substrate;

[0046] The specific process is to select a transparent substrate made of g...

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Abstract

The present invention provides an array substrate, which includes providing a substrate, and sequentially preparing a buffer layer, a polysilicon layer, a gate insulating layer, a low reflection layer, a gate, an inter-insulating layer, a source-drain electrode, an organic film layer, a common electrode, passivation layer, and pixel electrode; wherein, the low-reflection layer and the grid are prepared using the same photomask, and the low-reflection layer has the effect of absorbing light energy and weakening light reflection, replacing the design of the traditional light-shielding metal plate, and can also effectively The problem of photo-induced leakage current of the LTPS array substrate structure is reduced, and at the same time, the original photomask process of the traditional light-shielding metal plate is saved. Therefore, the implementation of the present invention can not only effectively reduce the photo-induced leakage current problem of the LTPS array substrate structure, but also reduce the number of photomasks required for array substrate fabrication, and reduce the production cycle and cost.

Description

technical field [0001] The invention relates to the technical field of liquid crystal display, in particular to an array substrate and a preparation method thereof. Background technique [0002] Compared with traditional A-Si (Amorphous Silicon Thin Film Transistor) technology, LTPS (Low Temperature Poly-silicon) technology has higher carrier mobility and is widely used in small and medium-sized high-resolution TFT LCDs ( Thin Film Transistor liquid crystal display, Thin Film Transistor liquid crystal display) and AMOLED (active matrix organic light emitting diode, Active-matrix organic light emitting diode) panel production, but the number of photomasks required for the corresponding TFT array substrate production is more More, the product production cycle is longer. Therefore, how to effectively reduce the production cycle of LTPS array substrates, increase production capacity and reduce costs, so as to increase the company's market competitiveness, is currently the focus...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/84H01L27/12G02F1/1362
CPCG02F1/136209G02F1/136227G02F1/136295H01L27/1214H01L27/1259H01L27/1288
Inventor 陆鹏李立胜颜源
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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