Mask plate replacing device and method

A replacement method and mask technology, applied in the field of sputter coating machines, can solve problems such as increased cost, mask failure, wasted time, etc.

Active Publication Date: 2018-12-18
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Especially for single-cavity coating, it takes more than 3 hours to replace each time. For continuous coating machines, the replacement is also a waste of time, and each time the substrate rack is taken from the machine, a substrate rack trolley must be used, which increases equipment costs and risk

Method used

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  • Mask plate replacing device and method
  • Mask plate replacing device and method
  • Mask plate replacing device and method

Examples

Experimental program
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Embodiment Construction

[0028] The problem to be solved by the present invention is how to effectively increase the replacement rate of the mask plate, reduce damage to the mask plate during the replacement process, and improve the coating efficiency. Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] like Figure 1-4 As shown, the mask replacement device of this embodiment includes a substrate frame 1 for carrying the mask 4, and an automatic locking mechanism 2 arranged on the substrate frame 1 for selectively locking or releasing the mask 4 And be arranged on the tray 3 that is used to hold up mask board 4 under the substrate holder 1, described substrate holder 1 comprises tray hole 12, and described tray 3 can selectively enter and leave described tray hole 12 so that described mask board 4 Lift up or put down, in order to facilitate the replacement of the mask plate, the tray directly passes through the tray hole 12 to...

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PUM

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Abstract

The invention discloses a mask plate replacing device and method. The mask plate replacing device comprises a substrate frame used for bearing a mask plate, an automatic locking mechanism which is arranged on the substrate frame and used for selectively locking or loosening the mask plate, and a supporting tray which is arranged below the substrate frame and used for lifting the mask plate. The substrate frame comprises a supporting tray hole, and the supporting tray can selectively enter and exit out of the supporting tray hole to lift up or put down the mask plate. According to the mask plate replacing device and method, the mask plate is arranged on the supporting tray through a clamping mechanism, the supporting tray is placed on the substrate frame, positioning of positioning pins reduces abrasion of the mask plate relative to fixing of threads, the automatic locking mechanism is stable and effective in fixing, and operation is convenient.

Description

technical field [0001] The invention relates to a sputtering coating machine, more specifically, to a mask replacement device and a replacement method of the sputtering coating machine. Background technique [0002] Sputtering coating machines are widely used in the coating process of TP, LCD, and OLED. In the coating process, there are many film-forming processes that do not require the entire substrate to be filmed. A close alignment system is used to deposit a film of a specific shape, and different product types use different masks. Every time the product model is replaced, the corresponding mask board will also be replaced, and after each replacement, the relative position of the mask board and the substrate frame must be kept unchanged during the film forming process, so as to produce The specific film pattern required. [0003] With the development of new technologies, the application of horizontal magnetron sputtering coating machines with mask plates and alignment...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/35
CPCC23C14/042C23C14/35
Inventor 谭伟
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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