A Reconfigurable Field-Effect Transistor with Asymmetric Structure
A field-effect transistor, asymmetric technology, applied in the field of reconfigurable field-effect transistors, can solve the problem of on-state current weakening of the device, achieve the effects of steep sub-threshold swing, control leakage current, and large off-state current
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[0017] See attached Figure 1 ~ Figure 3 , the present invention consists of a source 3 and a drain 4 arranged at both ends of the channel 1, and a control gate 5, a polarity gate 6 and a spacer 7 respectively arranged on one side of the source 3 and drain 4 to form an asymmetric A reconfigurable field effect transistor with a structure, the channel 1 between the polar gate 6 and the drain 4 is an underlapping region 8 provided with sidewalls 7; the channel 1 is made of carbon nanotubes, Graphene tube or silicon nanowire material; the source electrode 3 and the drain electrode 4 are electrodes formed by nickel silicide or nickel disilicide deposited on the outer layer of the channel 1; the control gate 5 and the polarity gate 6 is an electrode formed by photolithography on the gate oxide dielectric layer 2 deposited on the outer layer of the channel 1; the spacer 7 is silicon nitride, silicon dioxide or low-K dielectric deposited on the outer layer of the channel 1 Composed o...
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