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Mask plate and manufacturing method thereof

A manufacturing method and a technology of a mask plate, which are applied in semiconductor/solid-state device manufacturing, vacuum evaporation plating, coating, etc., can solve problems such as deformation and damage of the mask area, and affecting the effect of evaporation and film formation

Active Publication Date: 2020-08-25
BOE TECH GRP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, stretching will cause deformation or even damage to the mask area of ​​FMM, which will affect the effect of evaporation and film formation. Therefore, how to protect the mask area of ​​FMM during stretching is particularly important.

Method used

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  • Mask plate and manufacturing method thereof
  • Mask plate and manufacturing method thereof
  • Mask plate and manufacturing method thereof

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Embodiment Construction

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0029] The technology of mask evaporation on the display panel to form the required film pattern, for example, in the manufacturing process of OLED devices, the luminescent material is evaporated on the array substrate to form the corresponding sub-pixels, that is, by masking The film plate is attached to the surface of the substrate to be evaporated, and the mask plate includes a frame and a mask sheet fixed (for example, welded) on the frame, wherein a plural...

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Abstract

Embodiments of the present invention provide a mask plate and a manufacturing method thereof, which relate to the field of mask evaporation technology and are used to prevent damage to a mask area when stretching a mask plate. The manufacturing method of the mask plate includes: embedding a shaping mold into the mask area of ​​the mask sheet; bonding the mask sheet to the shaping mold; fixing the mask sheet on the frame through a netting process; The shape mold is separated from the mask sheet to form a mask sheet.

Description

technical field [0001] The invention relates to the technical field of mask evaporation, in particular to a mask plate and a manufacturing method thereof. Background technique [0002] OLED (Organic Light-Emitting Display, organic electroluminescent display) devices, such as active-matrix organic light-emitting diodes (English full name: Active-matrix organic light-emitting diode, English abbreviation: AMOLED), due to the high color gamut , ultra-thin and flexible display and other advantages, gradually received widespread attention. Especially curved and flexible OLEDs have been favored by many due to their unique features and excellent user experience. The main manufacturing process of the light-emitting layer of the OLED device is evaporation, that is, the organic material is heated to a certain temperature under vacuum conditions, so that the organic material is lifted to the surface of the substrate to form a thin film. To make a thin film with a fixed shape, the mask...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/166B21D11/02B29C70/74B29K2705/00B29K2905/00H10K71/00
Inventor 罗程远
Owner BOE TECH GRP CO LTD
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